JPS5777096A - Liquid phase epitaxial growing apparatus - Google Patents
Liquid phase epitaxial growing apparatusInfo
- Publication number
- JPS5777096A JPS5777096A JP15179480A JP15179480A JPS5777096A JP S5777096 A JPS5777096 A JP S5777096A JP 15179480 A JP15179480 A JP 15179480A JP 15179480 A JP15179480 A JP 15179480A JP S5777096 A JPS5777096 A JP S5777096A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- crystal
- plate
- holding
- arrow direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To obtain a high quality crystal with high productivity by constructing a soln. separating plate composed of a plurality of thin baths, a section holding a substrate crystal, etc. in a freely movable state in the titled growing apparatus applying a sliding method.
CONSTITUTION: A GaAs substrate crystal 101 is set on a substrate sliding plate 100, and platelike seed crystals 121W124 are attached to a section 120 holding the plate-like seed crystals. A solute and an impurity 111W114 are distributed to part of a soln. separating plate 110, and a solvent Ga 131W134 is poured in a bath 130 for a soln. for growth. The bath 130 is moved in the arrow direction to join the solvent Ga 131W134 and the solute 111W114 together, and by moving the plate 110 in the arrow direction, thin soln. layers 151W154 are formed. The section 100 holding the substrate crystal 101 is then moved in the arrow direction to slide the crystal 101 to the under sides of the layers 151W154 for growth in succession. Thus, a grown layer is obtd.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15179480A JPS5777096A (en) | 1980-10-29 | 1980-10-29 | Liquid phase epitaxial growing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15179480A JPS5777096A (en) | 1980-10-29 | 1980-10-29 | Liquid phase epitaxial growing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5777096A true JPS5777096A (en) | 1982-05-14 |
JPS6110431B2 JPS6110431B2 (en) | 1986-03-29 |
Family
ID=15526434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15179480A Granted JPS5777096A (en) | 1980-10-29 | 1980-10-29 | Liquid phase epitaxial growing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5777096A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01107449U (en) * | 1988-01-11 | 1989-07-20 | ||
EP4025622A1 (en) | 2019-09-03 | 2022-07-13 | Dow Global Technologies LLC | Foam formulation |
-
1980
- 1980-10-29 JP JP15179480A patent/JPS5777096A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6110431B2 (en) | 1986-03-29 |
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