JPS5468160A - Liquid phase epitaxial growth method - Google Patents
Liquid phase epitaxial growth methodInfo
- Publication number
- JPS5468160A JPS5468160A JP13455577A JP13455577A JPS5468160A JP S5468160 A JPS5468160 A JP S5468160A JP 13455577 A JP13455577 A JP 13455577A JP 13455577 A JP13455577 A JP 13455577A JP S5468160 A JPS5468160 A JP S5468160A
- Authority
- JP
- Japan
- Prior art keywords
- forming
- liquid phase
- epitaxial growth
- growth method
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To avoid boundary deficiency, by forming the crystal layer having homogeneous junction boundary, in liquid phase epitaxial growth method.
CONSTITUTION: The multi-dimensional growing solutions 5 and 6 more than three dimension are split into two, the specified dopant is included in them, and they are placed on each of the substrate 1 and the dummy crystal plate 2, they are cooled with a given and same condition, forming the first growing layer on the substrate and simultaneously, forming the growing layer on the dummy crystal plate 2. Next, the two solutions are moved at the same time and the solution present on the dummy crystal plate 2 is placed on the substrate 1, forming the second growing layer having the homogeneous junction boundary on the first growing layer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13455577A JPS5468160A (en) | 1977-11-11 | 1977-11-11 | Liquid phase epitaxial growth method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13455577A JPS5468160A (en) | 1977-11-11 | 1977-11-11 | Liquid phase epitaxial growth method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5468160A true JPS5468160A (en) | 1979-06-01 |
Family
ID=15131051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13455577A Pending JPS5468160A (en) | 1977-11-11 | 1977-11-11 | Liquid phase epitaxial growth method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5468160A (en) |
-
1977
- 1977-11-11 JP JP13455577A patent/JPS5468160A/en active Pending
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