JPS5747798A - Liquid phase epitaxial growing method - Google Patents

Liquid phase epitaxial growing method

Info

Publication number
JPS5747798A
JPS5747798A JP12155680A JP12155680A JPS5747798A JP S5747798 A JPS5747798 A JP S5747798A JP 12155680 A JP12155680 A JP 12155680A JP 12155680 A JP12155680 A JP 12155680A JP S5747798 A JPS5747798 A JP S5747798A
Authority
JP
Japan
Prior art keywords
substrate
melt
dummy
melts
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12155680A
Other languages
Japanese (ja)
Inventor
Keiichi Yoshitoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP12155680A priority Critical patent/JPS5747798A/en
Publication of JPS5747798A publication Critical patent/JPS5747798A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To prevent the excessive growth of an epitaxial layer to a substrate and the penetration of unnecessary components by carrying out the contact of each melt for forming an epitaxial layer with each dummy substrate by a specified system.
CONSTITUTION: A substrate slider 17 (movable) provided with the 1st dummy substrate 19 and a substrate 18, a melt holder 15 (fixed) holding the 1st and 3rd melts 11, 13, a substrate holder 20 (fixed) provided with the 2nd and 3rd dummy substrates 21, 22, and a melt slider 16 (movable) holding the 2nd and 4th melts 12, 14 are laminated to form a liq. phase epitaxial growing apparatus. By moving the sliders 17, 16 to the left, epitaxial growth is carried out on the substrate 18 from the 1st melt 11 brought into contact with the substrate 18, and simultaneously the supersaturation on the 2nd melt 12 is prevented by contact with the 2nd dummy substrate 21. The sliders 17, 16 are further moved to the left to drop the 2nd melt 12 onto the substrate 18 via a through hole 23, and epitaxial growth is carried out on the substrate 18 from the melt 12. By repeating similar operations to the melts 13, 14, the desired epitaxial layer is obtd.
COPYRIGHT: (C)1982,JPO&Japio
JP12155680A 1980-09-01 1980-09-01 Liquid phase epitaxial growing method Pending JPS5747798A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12155680A JPS5747798A (en) 1980-09-01 1980-09-01 Liquid phase epitaxial growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12155680A JPS5747798A (en) 1980-09-01 1980-09-01 Liquid phase epitaxial growing method

Publications (1)

Publication Number Publication Date
JPS5747798A true JPS5747798A (en) 1982-03-18

Family

ID=14814157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12155680A Pending JPS5747798A (en) 1980-09-01 1980-09-01 Liquid phase epitaxial growing method

Country Status (1)

Country Link
JP (1) JPS5747798A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105372A (en) * 1977-02-25 1978-09-13 Fujitsu Ltd Liquid phase epitaxial growing unit
JPS5481069A (en) * 1977-11-09 1979-06-28 Philips Nv Method of depositing epitaxial of plural layers

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105372A (en) * 1977-02-25 1978-09-13 Fujitsu Ltd Liquid phase epitaxial growing unit
JPS5481069A (en) * 1977-11-09 1979-06-28 Philips Nv Method of depositing epitaxial of plural layers

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