JPS62184732U - - Google Patents

Info

Publication number
JPS62184732U
JPS62184732U JP7209686U JP7209686U JPS62184732U JP S62184732 U JPS62184732 U JP S62184732U JP 7209686 U JP7209686 U JP 7209686U JP 7209686 U JP7209686 U JP 7209686U JP S62184732 U JPS62184732 U JP S62184732U
Authority
JP
Japan
Prior art keywords
substrate
growth
heat shield
introducing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7209686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7209686U priority Critical patent/JPS62184732U/ja
Publication of JPS62184732U publication Critical patent/JPS62184732U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7209686U 1986-05-14 1986-05-14 Pending JPS62184732U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7209686U JPS62184732U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7209686U JPS62184732U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Publications (1)

Publication Number Publication Date
JPS62184732U true JPS62184732U (enrdf_load_stackoverflow) 1987-11-24

Family

ID=30915245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7209686U Pending JPS62184732U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPS62184732U (enrdf_load_stackoverflow)

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