JPS62152431U - - Google Patents

Info

Publication number
JPS62152431U
JPS62152431U JP3973486U JP3973486U JPS62152431U JP S62152431 U JPS62152431 U JP S62152431U JP 3973486 U JP3973486 U JP 3973486U JP 3973486 U JP3973486 U JP 3973486U JP S62152431 U JPS62152431 U JP S62152431U
Authority
JP
Japan
Prior art keywords
heat shield
molecular beam
beam source
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3973486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3973486U priority Critical patent/JPS62152431U/ja
Publication of JPS62152431U publication Critical patent/JPS62152431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3973486U 1986-03-20 1986-03-20 Pending JPS62152431U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3973486U JPS62152431U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3973486U JPS62152431U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Publications (1)

Publication Number Publication Date
JPS62152431U true JPS62152431U (enrdf_load_stackoverflow) 1987-09-28

Family

ID=30853179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3973486U Pending JPS62152431U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS62152431U (enrdf_load_stackoverflow)

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