JPS62126371U - - Google Patents

Info

Publication number
JPS62126371U
JPS62126371U JP1397486U JP1397486U JPS62126371U JP S62126371 U JPS62126371 U JP S62126371U JP 1397486 U JP1397486 U JP 1397486U JP 1397486 U JP1397486 U JP 1397486U JP S62126371 U JPS62126371 U JP S62126371U
Authority
JP
Japan
Prior art keywords
molecular beam
resistance heater
beam source
crucible
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1397486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1397486U priority Critical patent/JPS62126371U/ja
Publication of JPS62126371U publication Critical patent/JPS62126371U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1397486U 1986-02-04 1986-02-04 Pending JPS62126371U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1397486U JPS62126371U (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1397486U JPS62126371U (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Publications (1)

Publication Number Publication Date
JPS62126371U true JPS62126371U (enrdf_load_stackoverflow) 1987-08-11

Family

ID=30803534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1397486U Pending JPS62126371U (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Country Status (1)

Country Link
JP (1) JPS62126371U (enrdf_load_stackoverflow)

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