JPS6452693A - Production of crystal by sealed tube method - Google Patents

Production of crystal by sealed tube method

Info

Publication number
JPS6452693A
JPS6452693A JP20938787A JP20938787A JPS6452693A JP S6452693 A JPS6452693 A JP S6452693A JP 20938787 A JP20938787 A JP 20938787A JP 20938787 A JP20938787 A JP 20938787A JP S6452693 A JPS6452693 A JP S6452693A
Authority
JP
Japan
Prior art keywords
cock
crucible
crystal
gas
feedstock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20938787A
Other languages
Japanese (ja)
Inventor
Shiro Sakuragi
Satoru Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP20938787A priority Critical patent/JPS6452693A/en
Publication of JPS6452693A publication Critical patent/JPS6452693A/en
Pending legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To obtain high-purity crystal by applying dry etching method to the crystal production process to eliminate trace impurities from the feedstock and crucible. CONSTITUTION:A quartz crucible 1 is packed with seed crystal 2 and Ga-As feedstock 3 and a crucible cap 4 is then welded at the cap sealing section 5. The crucible 1 is then put in an electric furnace 6 followed by exhaust with a vacuum pump 8 via a-cock 7. Thence, an etching gas is fed to the Ga-As feedstock 3 from a halogen gas ampule 11 through on-off operation of b-cock 9 and c-cock 10. Following the etching, the quartz crucible 1 is sealed at the sealing section 12 either in a vacuum or in an inert gas atmosphere brought to specified pressure by feeding said gas via d-cock 14 from a gas cylinder 13.
JP20938787A 1987-08-25 1987-08-25 Production of crystal by sealed tube method Pending JPS6452693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20938787A JPS6452693A (en) 1987-08-25 1987-08-25 Production of crystal by sealed tube method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20938787A JPS6452693A (en) 1987-08-25 1987-08-25 Production of crystal by sealed tube method

Publications (1)

Publication Number Publication Date
JPS6452693A true JPS6452693A (en) 1989-02-28

Family

ID=16572065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20938787A Pending JPS6452693A (en) 1987-08-25 1987-08-25 Production of crystal by sealed tube method

Country Status (1)

Country Link
JP (1) JPS6452693A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474787A (en) * 1990-07-12 1992-03-10 Kobe Steel Ltd Method for cleaning apparatus for producing single crystal and production of single crystal
JPH0492881A (en) * 1990-08-03 1992-03-25 Kobe Steel Ltd Cleaning of container for producing single crystal and production of single crystal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474787A (en) * 1990-07-12 1992-03-10 Kobe Steel Ltd Method for cleaning apparatus for producing single crystal and production of single crystal
JPH0492881A (en) * 1990-08-03 1992-03-25 Kobe Steel Ltd Cleaning of container for producing single crystal and production of single crystal

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