JPH0257665A - Magnetic alloy for magnetic head - Google Patents
Magnetic alloy for magnetic headInfo
- Publication number
- JPH0257665A JPH0257665A JP20713688A JP20713688A JPH0257665A JP H0257665 A JPH0257665 A JP H0257665A JP 20713688 A JP20713688 A JP 20713688A JP 20713688 A JP20713688 A JP 20713688A JP H0257665 A JPH0257665 A JP H0257665A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- alloy
- oxygen
- nitrogen
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001004 magnetic alloy Inorganic materials 0.000 title claims abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 24
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000001301 oxygen Substances 0.000 claims abstract description 14
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 12
- 229910052742 iron Inorganic materials 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052786 argon Inorganic materials 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- -1 Argon ions Chemical class 0.000 abstract description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 230000004907 flux Effects 0.000 description 15
- 229910045601 alloy Inorganic materials 0.000 description 13
- 239000000956 alloy Substances 0.000 description 13
- 229910000702 sendust Inorganic materials 0.000 description 9
- 239000011521 glass Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910000979 O alloy Inorganic materials 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910001337 iron nitride Inorganic materials 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、特に高密度磁気記録に適する磁気ヘッド用磁
性合金に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic alloy for a magnetic head that is particularly suitable for high-density magnetic recording.
（従来の技術）
近年、磁気記録の高密度化や広帯域化の必要性が高まり
、磁気記録媒体に高い抗磁力を有する磁性材料を使用し
て記録トラック幅を狭くすることにより、高密度記録再
生を実現している。(Prior art) In recent years, the need for higher density and wider band magnetic recording has increased, and high-density recording and reproduction is possible by narrowing the recording track width by using magnetic materials with high coercive force in magnetic recording media. has been realized.
そして、この高い抗磁力を持つ磁気記録媒体に記録再生
するための磁気ヘッドの材料として、飽和磁束密度の高
い磁性合金が必要とされており、センダスト合金や非晶
質合金等をコアの一部または全部に使用した磁気ヘッド
が提案されている。Magnetic alloys with high saturation magnetic flux density are required as materials for magnetic heads for recording and reproducing on magnetic recording media with high coercive force, and sendust alloys and amorphous alloys are used as part of the core. Alternatively, a magnetic head used for all has been proposed.
しかしながら、磁気記録媒体の高抗磁力化が一段と進み
、抗磁力が２００００ｅ以上になるとセンダスト合金や
非晶質合金等を使用した磁気ヘッドでは良好な記録再生
が困難になった。However, as the coercive force of magnetic recording media continues to increase and the coercive force exceeds 20,000e, it becomes difficult to perform good recording and reproduction with magnetic heads using sendust alloys, amorphous alloys, or the like.
また、磁気記録媒体の長手方向ではなく、厚さ方向に磁
化して記録する垂直磁化記録方式も提案されているが、
この垂直磁化記録方式を良好に行なうには、磁気ヘッド
の主磁極の先端部の厚さを０．５μｍ以下にしなければ
ならないので、比較的抗磁力の低い磁気記録媒体に記録
するのにも高い飽和磁束密度を持つ磁気ヘッドが必要と
されている。Additionally, a perpendicular magnetization recording method has been proposed in which the magnetic recording medium is magnetized in the thickness direction rather than in the longitudinal direction.
In order to successfully perform this perpendicular magnetization recording method, the thickness of the tip of the main magnetic pole of the magnetic head must be 0.5 μm or less, so it is difficult to record on a magnetic recording medium with relatively low coercive force. A magnetic head with saturation magnetic flux density is needed.
そして、センダスト合金や非晶質合金等より抗磁力の高
い磁気ヘッド用合金として、窒化鉄等の鉄を主成分とし
た磁性合金が知られている。Magnetic alloys containing iron as a main component, such as iron nitride, are known as alloys for magnetic heads that have higher coercive force than sendust alloys, amorphous alloys, and the like.
（発明が解決しようとする課題）
ところが、従来より知られている高飽和磁束密度の磁性
合金は、保磁力が大きくそのままでは磁気ヘッド材料と
しては不十分であるので、センダスト合金やパーマロイ
等の保磁力の小さい磁性材料を層間膜として使用した多
層膜構造の磁気ヘッドが提案されている。(Problem to be Solved by the Invention) However, conventionally known magnetic alloys with high saturation magnetic flux density have a large coercive force and are not sufficient as magnetic head materials as they are. A magnetic head with a multilayer structure using a magnetic material with low magnetic force as an interlayer film has been proposed.
例えば、センダスト合金の場合には、酸化物基板上に成
膜すると基板とセンダスト合金膜の境界面に磁気特性の
劣る層が形成され、センダスト合金膜が薄いとこの境界
面の磁気特性の劣る層の影響でセンダスト合金膜として
良好な磁気特性が得られなくなる。For example, in the case of Sendust alloy, when a film is formed on an oxide substrate, a layer with poor magnetic properties is formed at the interface between the substrate and the Sendust alloy film, and if the Sendust alloy film is thin, this layer with poor magnetic properties at the interface. Due to this influence, it becomes impossible to obtain good magnetic properties as a sendust alloy film.
したがって、センダスト合金膜を用いる場合には、−殻
内には２〜３μｍ以上、の膜厚、が必要であり、これ以
下の膜厚にする場合には、パーマロイ等の磁性膜を下地
として成膜した後にセンダスト合金膜を成膜しなければ
ならなかった。Therefore, when using a sendust alloy film, it is necessary to have a film thickness of 2 to 3 μm or more inside the shell.If the film thickness is less than this, it is formed using a magnetic film such as permalloy as a base. After that, a sendust alloy film had to be deposited.
また、高飽和磁束密度の磁性合金である窒化鉄膜の場合
、膜厚が厚くなると磁気特性が劣化するため、１μｍ以
上の膜厚が必要な場合は、異なる磁性合金または絶縁物
とで多層膜にする必要がある。In the case of an iron nitride film, which is a magnetic alloy with a high saturation magnetic flux density, the magnetic properties deteriorate as the film becomes thicker, so if a film thickness of 1 μm or more is required, a multilayer film with a different magnetic alloy or insulator is required. It is necessary to
このように、高飽和磁束密度を持つ磁気ヘッドを作製す
るためには磁性合金を多層構造にしなければならず、多
層構造にするのには工数やコストがかかり、信頼性を保
持するのが難しいという課題があった。In this way, in order to create a magnetic head with high saturation magnetic flux density, magnetic alloys must be made into a multilayer structure, which requires many man-hours and costs, and is difficult to maintain reliability. There was a problem.
そこで、本発明は多層構造にしなくても高飽和磁束密度
を持ち、保磁力の小さい磁気ヘッドが得られる磁気ヘッ
ド用磁性合金を提供することを目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a magnetic alloy for a magnetic head that can provide a magnetic head with high saturation magnetic flux density and low coercive force without having a multilayer structure.
（課題を解決するための手段）
上記目的を達成するための手段として、鉄を主成分とし
、窒素を１乃至６重量パーセント、酸素を０．５乃至５
重量パーセント含有することを特徴とする磁気ヘッド用
磁性合金を提供しようとするものである。(Means for solving the problem) As a means for achieving the above object, iron is the main component, nitrogen is 1 to 6 weight percent, and oxygen is 0.5 to 5 percent by weight.
It is an object of the present invention to provide a magnetic alloy for a magnetic head, which is characterized by containing a weight percent of
（実施例）
本発明の磁気ヘッド用磁性合金の製造装置を第１図に示
す。(Example) An apparatus for manufacturing a magnetic alloy for a magnetic head according to the present invention is shown in FIG.
純鉄のターゲット５はターゲットホルダー９によって支
えられており、このターゲット５とターゲットボルダ−
９には、直流電源１３よりマイナス電位が印加され、タ
ーゲットホルダー９の周囲にはシールド４が取付けであ
る。A target 5 made of pure iron is supported by a target holder 9, and this target 5 and a target boulder
A negative potential is applied to 9 from a DC power source 13, and a shield 4 is attached around the target holder 9.
また、このターゲットホルダー９の内部には、プラズマ
１５を集束するための磁石６が挿入され、ターゲット５
の表面の加熱を防止するために冷却水８が流入している
。Further, a magnet 6 for focusing the plasma 15 is inserted inside the target holder 9, and a magnet 6 for focusing the plasma 15 is inserted into the target holder 9.
Cooling water 8 flows in to prevent the surface from heating.
そして、接地された真空槽１４の左右に、２個のターゲ
ットホルダー９が絶縁体７によって絶縁されて設けられ
ている。Two target holders 9 are provided on the left and right sides of the grounded vacuum chamber 14 and are insulated by an insulator 7.
また、この真空ＷＪ１４の上部より、酸素、窒素、アル
ゴンがそれぞれ流量計１〜３により、所定の流量に調節
されて導入されている。Furthermore, oxygen, nitrogen, and argon are introduced from the upper part of the vacuum WJ 14 after being adjusted to predetermined flow rates by flowmeters 1 to 3, respectively.
なお、アルゴンは、ターゲット５をスパッタすると同時
に成膜する磁性合金膜中の酸素と窒素の同を調節するた
めのものである。Note that argon is used to adjust the ratio of oxygen and nitrogen in the magnetic alloy film formed at the same time as the target 5 is sputtered.
そして、真空槽１４の下部には、基板ホルダー１２上に
基板１１が置かれ、不純物を防ぐためのシャッタ−１０
が基板１１を覆っている。The substrate 11 is placed on the substrate holder 12 at the bottom of the vacuum chamber 14, and a shutter 10 is installed to prevent impurities.
covers the substrate 11.
このようなスパッタ装置において、直流電源１３により
、左右のターゲットホルダー９に支えられたターゲット
５０間にプラズマ１５を発生させると、ターゲット５は
マイナス電位であるので、プラズマ１５中のアルゴンイ
オン（Ａｒ＋）がターゲラ１〜５に衝突し、ターゲット
５の鉄原子が飛出す。In such a sputtering apparatus, when a plasma 15 is generated between the targets 50 supported by the left and right target holders 9 by the DC power supply 13, since the target 5 has a negative potential, argon ions (Ar+) in the plasma 15 are generated. collides with Targetera 1-5, and the iron atoms of target 5 fly out.
ぞして、ターゲット５から飛出した鉄原子と、プラズマ
中の酸素と窒素の原子または分子と結合して、基板１１
の上に成長していく。Then, the iron atoms flying out from the target 5 combine with oxygen and nitrogen atoms or molecules in the plasma, and the substrate 11
will grow on top of.
なお、スパッタ間始後の数分間は、シャッター１０を閉
じて基板１１を覆うことにより、ターゲット５の表面の
不純物が基板１１の上に付かないようにし、その後でシ
ャッター１０を開けるようにする。Note that for several minutes after the start of sputtering, the shutter 10 is closed to cover the substrate 11 to prevent impurities on the surface of the target 5 from adhering to the substrate 11, and then the shutter 10 is opened.
そして、流量計１〜３により、酸素、窒素、アルゴンの
導入量を調節することにより、所望の酸素および窒素を
含有したＦｅ−Ｎ−０合金膜を得ることができる。By adjusting the amounts of oxygen, nitrogen, and argon introduced using the flowmeters 1 to 3, it is possible to obtain a Fe-N-0 alloy film containing desired oxygen and nitrogen.
このようにして、得たＦｅ−Ｎ−０合金膜の酸素および
窒素の含有量と飽和磁束密度（Ｂｓ）、保磁力（ＩＩＣ
）との関係を表１に示す。In this way, the content of oxygen and nitrogen, saturation magnetic flux density (Bs), coercive force (IIC) of the obtained Fe-N-0 alloy film
) is shown in Table 1.
なお、参考として資料番号８に純鉄についても値を示し
た。For reference, the values for pure iron are also shown in document number 8.
（以下余白）
表 １
表１から解るように、Ｆｅ−Ｎ−０含金の酸素および窒
素の含有量が変化すると、飽和磁束密度（ＢＳ）や保磁
力（ＩＩＣ）に影響がでる。(Margin below) Table 1 As can be seen from Table 1, when the content of oxygen and nitrogen in the Fe-N-0 metal changes, the saturation magnetic flux density (BS) and coercive force (IIC) are affected.
ぞして、酸素や窒素の含有ａｔよ、多くても少くても良
い値は得られず、資料番号１．３．４で示される飽和磁
束密度（ＢＳ）や保磁力（Ｈｃ）の値が良好と考えられ
る。Therefore, it is not possible to obtain a good value for the content of oxygen or nitrogen, whether it is large or small, and the values of saturation magnetic flux density (BS) and coercive force (Hc) shown in document number 1.3.4 are Considered to be in good condition.
したがって、窒素の含有量が１乃至６型部パーセント、
酸素の含有量が０．５乃至５重量パーセントの範囲であ
れば、１５ｋＧ以上の高飽和磁束密度と、１．５ｏｅ以
下の低保磁力を持つＦｅ−Ｎ−０含金を得ることができ
る。Therefore, if the nitrogen content is 1 to 6 type part percent,
If the oxygen content is in the range of 0.5 to 5 weight percent, it is possible to obtain a Fe-N-0 containing metal having a high saturation magnetic flux density of 15 kG or more and a low coercive force of 1.5 oe or less.
また、酸化物を含む結晶化ガラス基板上に本発明の磁気
ヘッド用磁性合金であるＦｅ−Ｎ−０含金を成膜したと
ぎの飽和磁束密度（Ｂｓ）と保磁力（Ｈｃ）と膜厚との
関係を第２図のグラフに示す。In addition, the saturation magnetic flux density (Bs), coercive force (Hc), and film thickness of a film containing Fe-N-0, which is a magnetic alloy for a magnetic head of the present invention, is formed on a crystallized glass substrate containing an oxide. The relationship between the two is shown in the graph of Figure 2.
このグラフより、膜厚が０．５μｍまでは飽和磁束密度
（Ｂｓ）は増加し、保磁力（ＩＩｃ）は減少していき、
膜厚が０．５μｍより厚みを増すと飽和磁束密度（ＢＳ
）は約１７ｋＧで、保磁力（ＩＩｃ）は約Ｑ、５０ｅで
ほぼ一定の値を維持している。From this graph, the saturation magnetic flux density (Bs) increases and the coercive force (IIc) decreases until the film thickness reaches 0.5 μm.
When the film thickness increases beyond 0.5 μm, the saturation magnetic flux density (BS
) is about 17 kG, and the coercive force (IIc) is about Q, which maintains a nearly constant value of 50e.
したがって、このＦｅ−Ｎ−０含金を酸化物を含む結晶
化ガラス基板上に成膜するときは、膜厚を０．５μｍ以
上にすれば良好な磁気特性を得ることができる。Therefore, when forming this Fe-N-0-containing metal film on a crystallized glass substrate containing an oxide, good magnetic properties can be obtained by making the film thickness 0.5 μm or more.
（発明の効果°）
本発明の磁気ヘッド用磁性合金は、高飽和磁束密度で低
保磁力であるので、多層化しなくても、高い抗磁力を持
つ磁気記録媒体用の磁気ヘッドを得ることができる。(Effects of the Invention°) The magnetic alloy for magnetic heads of the present invention has a high saturation magnetic flux density and a low coercive force, so it is possible to obtain a magnetic head for a magnetic recording medium with a high coercive force without multilayering. can.
また、膜厚を厚くしても良好な磁気特性が冑られるので
、多層化しなくても所望のコア厚に加工することもでき
る。Further, since good magnetic properties are maintained even when the film thickness is increased, it is possible to process the core to a desired thickness without using multiple layers.
したがって、多層化するための製造工数やコストを削減
した上で高密度磁気記録が可能となるという効果がある
。Therefore, there is an effect that high-density magnetic recording is possible while reducing the number of manufacturing steps and costs for multilayering.
第１図は本発明の磁気ヘッド用磁性合金の製造装置を示
す図、第２図は本発明の磁性合金を酸化物を含む結晶化
ガラス基板上に成膜したときの飽和磁束密度および保磁
力と磁性合金膜の膜厚との関係を示すグラフである。
１〜３・・・流量計、４・・・シールド、５・・・ター
ゲット、６・・・磁石、７・・・絶縁体、８・・・冷却
水、９・・・ターゲットホルダー１０・・・シャッター
、１１・・・基板、１２・・・基板ホルダー、１３・・
・直流電源、１４・・・真空槽、１５・・・プラズマ。
特 許 出願人 日本ビクター株式会社代表者 垣木
邦人
第１１Fig. 1 shows a manufacturing apparatus for a magnetic alloy for a magnetic head of the present invention, and Fig. 2 shows the saturation magnetic flux density and coercive force when the magnetic alloy of the present invention is formed into a film on a crystallized glass substrate containing an oxide. 3 is a graph showing the relationship between the magnetic alloy film thickness and the film thickness of the magnetic alloy film. 1 to 3...Flowmeter, 4...Shield, 5...Target, 6...Magnet, 7...Insulator, 8...Cooling water, 9...Target holder 10...・Shutter, 11... Board, 12... Board holder, 13...
・DC power supply, 14... Vacuum chamber, 15... Plasma. Patent Applicant: Japan Victor Co., Ltd. Representative Kakiki
Japanese 11th
Claims (1)
とする磁気ヘッド用磁性合金。[Scope of Claims] A magnetic alloy for a magnetic head, characterized in that the main component is iron, and contains 1 to 6 weight percent of nitrogen and 0.5 to 5 weight percent of oxygen.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20713688A JP2689512B2 (en) | 1988-08-20 | 1988-08-20 | Magnetic alloy for magnetic head |
| US07/394,459 US4969962A (en) | 1988-08-20 | 1989-08-16 | Magnetic alloys for magnetic head |
| DE3927342A DE3927342A1 (en) | 1988-08-20 | 1989-08-18 | MAGNETIC ALLOYS FOR MAGNETIC HEADS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20713688A JP2689512B2 (en) | 1988-08-20 | 1988-08-20 | Magnetic alloy for magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257665A true JPH0257665A (en) | 1990-02-27 |
| JP2689512B2 JP2689512B2 (en) | 1997-12-10 |
Family
ID=16534794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20713688A Expired - Lifetime JP2689512B2 (en) | 1988-08-20 | 1988-08-20 | Magnetic alloy for magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2689512B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5176082A (en) * | 1991-04-18 | 1993-01-05 | Chun Joong H | Subway passenger loading control system |
| US5302469A (en) * | 1990-05-22 | 1994-04-12 | Tdk Corporation | Soft magnetic thin film |
-
1988
- 1988-08-20 JP JP20713688A patent/JP2689512B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5302469A (en) * | 1990-05-22 | 1994-04-12 | Tdk Corporation | Soft magnetic thin film |
| US5176082A (en) * | 1991-04-18 | 1993-01-05 | Chun Joong H | Subway passenger loading control system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2689512B2 (en) | 1997-12-10 |
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