JPH02118055A - Magnetic alloy for magnetic head - Google Patents

Abstract

PURPOSE:To manufacture the title magnetic alloy suitable to high density magnetic recording by preparing a magnetic alloy consisting essentially of iron and contg. specific ratios of N2, O2 and Ru. CONSTITUTION:O2, N2 and Ar are fed to a chamber 5 of a sputtering apparatus 1 while controlling their amounts by each flowmeter 2, 3 and 4 and potential is impressed between targets (Fe-Ru alloy) supported by left and right target holders 8 from DC power source 10 to generate plasma 16. Since the targets have negative potential, Ar ions in the plasma 16 are bomberded with the targets and iron atoms and Ru atoms in the targets are sprung out. The iron atoms and Ru atoms are combined with the atoms or moleclues in the plasma 16 and open a shutter 15 to form a film of a magnetic alloy consisting essentially of iron and contg. at least, by weight, 1 to 6% N2, 0.5 to 5% O2 and 0.5 to 10% Ru onto a substrate 14. The magnetic alloy has low coercive force and excellent corrosion resistance, by which a magnetic head suitable to high density recording can be formed.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic alloy for a magnetic head that is particularly suitable for high-density magnetic recording.

(Prior art) In recent years, the need for higher density and wider band magnetic recording has increased, and high-density recording and reproduction is possible by narrowing the recording track width by using magnetic materials with high coercive force in magnetic recording media. has been realized.

Magnetic alloys with high saturation magnetic flux density are required as materials for magnetic heads for recording and reproducing on magnetic recording media with high coercive force, and sendust alloys and amorphous alloys are used as part of the core. Alternatively, a magnetic head used for all has been proposed.

However, as the coercive force of magnetic recording media continues to increase and the coercive force exceeds 200,008, it becomes difficult to perform good recording and reproduction with magnetic heads using sendust alloys, amorphous alloys, or the like.

On the other hand, a perpendicular magnetization recording method has also been proposed in which the magnetic recording medium is magnetized in the thickness direction rather than in the longitudinal direction.
In order to successfully perform this perpendicular magnetization recording method, the thickness of the tip of the main GI pole of the magnetic head must be 0.5 μm or less, so it is suitable for recording on magnetic recording media with relatively low coercive force. There is a need for a magnetic head with high saturation magnetic flux density.

Magnetic alloys containing iron as a main component, such as iron nitride, are known as alloys for magnetic heads that have higher coercive force than sendust alloys, amorphous alloys, and the like.

(Problem to be Solved by the Invention) However, conventionally known magnetic alloys with high saturation magnetic flux density have a large coercive force and are not sufficient as magnetic head materials as they are. A magnetic head with a multilayer V structure using a magnetic material with low magnetic force as an interlayer film has been proposed.

In addition, in the case of Sendust alloy, when a film is formed on an oxide substrate, a layer with poor magnetic properties is formed at the interface between the substrate and the Sendust alloy film, and if the Sendust alloy film is thin, a layer with poor magnetic properties at the interface is formed. Due to this influence, it becomes impossible to obtain good magnetic properties as a sendust alloy film.

Therefore, when using a sendust alloy film, it is necessary to have a film thickness of 2 to 3 μm or more numerically.If the film thickness is less than this, the film must be formed using a magnetic film such as permalloy as a base. Later, a Sendust alloy film had to be deposited.

In the case of an iron nitride film, which is a magnetic alloy with a high saturation magnetic flux density, the magnetic properties deteriorate as the film becomes thicker, so if a film thickness of 1 μm or more is required, a multilayer film with a different magnetic alloy or insulator is required. It is necessary to

In this way, in order to create a magnetic head with high saturation magnetic flux density, the magnetic alloy must be made into a multilayer structure, and creating a multilayer G4 structure requires many man-hours and costs, and it is difficult to maintain reliability. The challenge was difficult.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a magnetic alloy for a magnetic head that can provide a magnetic head with high saturation magnetic flux density and low coercive force without having a multilayer structure.

(Means for Solving the Problem) As a means for achieving the above object, the main component is iron, at least 1 to 6% by weight of nitrogen, and 0% of oxygen.
．． It is an object of the present invention to provide a magnetic alloy for a magnetic head characterized by containing 5 to 5 weight percent of ruthenium and 0.5 to 0.5 weight percent of ruthenium.

(Repair Example) FIG. 1 shows a sputtering apparatus that is an example of manufacturing the magnetic alloy for a magnetic head of the present invention.

This sputtering apparatus 1 uses oxygen (021° nitrogen (N
2) and a flow meter to adjust the argon (A') gas.
It has Champara with 3.4. Inside this Champara, there is a Fe-Ru (iron-ruthenium) alloy target 6.
This is a so-called facing target type having a pair of target holders 8, 8 which are placed opposite each other with insulators 7, 7 in between. Shields 9, 9 are attached to the outer periphery of the target holders 8, 8.

Further, a negative potential is applied to the target 6 and the target holder 8 compared to the direct type a and 10.

Furthermore, a plasma 16 is contained within this target holder 8.8.
Magnets 11.11 are arranged to focus the water, and cooling water 12 flows in to prevent heating of the surface.

Note that argon is used to adjust the amount of oxygen and nitrogen in the magnetic alloy film formed at the same time as the target 6 is sputtered.

Then, the substrate 14 is placed in the substrate holder 13 at the bottom of the Champara.
is placed on the substrate 14, and a shutter 15 for preventing impurities is placed on the substrate 14.
is covered.

In the sputtering apparatus 1 configured as described above, the direct A
Wb 1ljit 10 causes plasma 1 to flow between the targets 6.6 supported by the left and right target holders 88.
6, since the target 6.6 has a negative potential, the argon ions (Art) in the plasma 16
collides with target 6, iron atoms of target 6 and R
The u atom pops out.

Then, the iron atoms and Rkl atoms flying out from the target 6 are combined with oxygen and nitrogen atoms or molecules in the plasma to form a film on the substrate 14.

Note that for several minutes after the start of sputtering, the shutter 1 is closed to prevent impurities on the surface of the target 6 from adhering to the substrate 14.
5 to cover the substrate 14, and then the shutter 15 is opened.

By adjusting the amounts of oxygen, nitrogen, and argon introduced using the flowmeters 2 to 4, it is possible to obtain a [e-to-0-Ru alloy film containing desired oxygen and nitrogen.

Oxygen in the Fe-10-Ru alloy film thus obtained.

Nitrogen and ruthenium content and saturation magnetic flux density (Bs),
The relationship with coercive force (Ilc) is shown in the table.

Material f4 #1 in the table shows the magnetic properties of pure iron, and it can be seen that HC is reduced by containing nitrogen and oxygen. Also, if the nitrogen and oxygen content is too high, B
An increase in s and Hc is observed, and there is an optimum value for the nitrogen and oxygen contents. B s1500gau if nitrogen is 1 to 6% by weight and oxygen is 0.5 to 5%
A high Bs soft magnetic alloy having a Bs of ss or more and a Ha of 1.50e or less can be obtained.

In addition, the Fe-N-0 alloy film and the Fe-N-0-Ru alloy film were immersed in 2% salt water, then taken out and further heated to 60°C.
An example of the results of a corrosion resistance test conducted at a high temperature of 90% is shown in FIG.

In the figure, the vertical axis indicates the ratio of Bs (Bs(t)) after the start of the corrosion resistance test to Bs (Bs(0)) immediately after film formation.

As can be seen from the table, as the Ru content of the Fe-0-Ru alloy increases, the saturation magnetic flux density (BS) decreases and the coercive force group C) decreases.

As a magnetic material for a magnetic head, it is desirable to have a high BS and a low Hc, but in document number 10, the Fe-N-0-Ru alloy containing 4 weight percent Ru,
Compared to Sendust alloy, which is a known high BS material, HC has a low Hc equivalent to that of Sendust alloy, and Bs has realized a high BS of 1.5 times or more than Sendust alloy. R
If the u content is 10ti% or more, it is possible to obtain a magnetic material for a magnetic head having Bs equal to or higher than that of the Centast alloy.

Moreover, as can be seen from FIG. 2, as the Ru content of the Fe-N-0-Ru alloy increases, the corrosion resistance of the alloy improves. If the Ru content is 0.5 weight percent or more, it is effective for corrosion resistance.

However, when the Ru content is 0.2% by weight, the corrosion resistance is conversely worse than when Ru is not contained.

Therefore, if the Ru content is in the range of 0.5 to 10 F-cents, it is possible to obtain a Fe-N-0-Ru alloy that has high saturation magnetic flux density, low coercive force, and excellent corrosion resistance. .

(Effects of the Invention) The magnetic alloy for magnetic heads of the present invention can achieve low coercive force and excellent corrosion resistance by containing ruthenium, and can perform recording and reproduction on magnetic recording media with high coercive force. This has the effect that a magnetic head suitable for high-density recording can be obtained.

[Brief explanation of drawings]

Fig. 1 is a diagram showing a sputtering apparatus as an example for manufacturing the magnetic alloy for magnetic heads of the present invention, and Fig. 2 shows the difference in corrosion resistance when the Ru content of the magnetic alloy of the present invention is changed. FIG. 1... Sputtering device, 2-4... Flow meter, 5
...Chamber, 6...Target, 8...Target holder, 11...Magnet. Patent Applicant Kakimoto, Representative of Victor Japan Co., Ltd.
Kunio Sen1 Zucho Tsugaya 1iiE is 4 April 1989/Dguchi III Japanese 631 [Seiko'1 Application No. 270048 2.1 Ming name: magnetic inclusion for head 3, with correction skewer 1 '[Relationship with 1re1 Applicant Address 3-12-6 Moriyamachi, Yamagami Yoyo-ku, Yokohama, Kanagawa Prefecture
, Contents of the amendment (1) In the specification, is "coercive force" in lines 16 and 17 of page 2 called "saturation magnetic flux density"? I'll make one. (2) Insert "10" between "to" and FΦml in the 16th line of page 2. (:3) Same, page 7, line 1, after “can be done.” “Also, nitric oxide (No> may be used instead of acid bar H (02) and nitrogen A (N 2 >). (1) l' B S J and 1° on page 8, line 4 of the same page.
Insert "decrease in" between 1 and 1. (9 Id., amend 1 to 1 in line 7 of 9EQ. Voluntary supplementary row 5, detailed description of the amendment; column for detailed explanation of the invention in parentheses)

Claims (1)

[Claims] 1. A magnetic alloy for a magnetic head, comprising iron as a main component, and containing at least 1 to 6 weight percent of nitrogen, 0.5 to 5 weight percent of oxygen, and 0.5 to 10 weight percent of ruthenium.