JPH0256810B2 - - Google Patents

Info

Publication number
JPH0256810B2
JPH0256810B2 JP18211384A JP18211384A JPH0256810B2 JP H0256810 B2 JPH0256810 B2 JP H0256810B2 JP 18211384 A JP18211384 A JP 18211384A JP 18211384 A JP18211384 A JP 18211384A JP H0256810 B2 JPH0256810 B2 JP H0256810B2
Authority
JP
Japan
Prior art keywords
inp
ingaasp
etching
diffraction grating
etching solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18211384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159839A (ja
Inventor
Masayuki Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP18211384A priority Critical patent/JPS6159839A/ja
Publication of JPS6159839A publication Critical patent/JPS6159839A/ja
Publication of JPH0256810B2 publication Critical patent/JPH0256810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30612—Etching of AIIIBV compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP18211384A 1984-08-31 1984-08-31 エツチング液 Granted JPS6159839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18211384A JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18211384A JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Publications (2)

Publication Number Publication Date
JPS6159839A JPS6159839A (ja) 1986-03-27
JPH0256810B2 true JPH0256810B2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=16112557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18211384A Granted JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Country Status (1)

Country Link
JP (1) JPS6159839A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5296719A (en) * 1991-07-22 1994-03-22 Matsushita Electric Industrial Co., Ltd. Quantum device and fabrication method thereof

Also Published As

Publication number Publication date
JPS6159839A (ja) 1986-03-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term