JPH0249715Y2 - - Google Patents

Info

Publication number
JPH0249715Y2
JPH0249715Y2 JP1984115640U JP11564084U JPH0249715Y2 JP H0249715 Y2 JPH0249715 Y2 JP H0249715Y2 JP 1984115640 U JP1984115640 U JP 1984115640U JP 11564084 U JP11564084 U JP 11564084U JP H0249715 Y2 JPH0249715 Y2 JP H0249715Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck plates
pitch
groove
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984115640U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133443U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11564084U priority Critical patent/JPS6133443U/ja
Publication of JPS6133443U publication Critical patent/JPS6133443U/ja
Application granted granted Critical
Publication of JPH0249715Y2 publication Critical patent/JPH0249715Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP11564084U 1984-07-28 1984-07-28 ウエハ−移載装置 Granted JPS6133443U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11564084U JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11564084U JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Publications (2)

Publication Number Publication Date
JPS6133443U JPS6133443U (ja) 1986-02-28
JPH0249715Y2 true JPH0249715Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30674601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11564084U Granted JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Country Status (1)

Country Link
JP (1) JPS6133443U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646647B2 (ja) * 1988-03-11 1994-06-15 株式会社東芝 半導体ウェハのピッチ切換え装置
JPH0312216A (ja) * 1989-06-09 1991-01-21 Toshiba Corp 防湿庫

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6032352B2 (ja) * 1978-04-19 1985-07-27 株式会社日立製作所 板状物の移換装置
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機

Also Published As

Publication number Publication date
JPS6133443U (ja) 1986-02-28

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