JPS6133443U - ウエハ−移載装置 - Google Patents

ウエハ−移載装置

Info

Publication number
JPS6133443U
JPS6133443U JP11564084U JP11564084U JPS6133443U JP S6133443 U JPS6133443 U JP S6133443U JP 11564084 U JP11564084 U JP 11564084U JP 11564084 U JP11564084 U JP 11564084U JP S6133443 U JPS6133443 U JP S6133443U
Authority
JP
Japan
Prior art keywords
wafer
pair
groove
transfer device
chuck plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11564084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249715Y2 (enrdf_load_stackoverflow
Inventor
良介 佐藤
晴彦 牧野
明和 小久保
和弘 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11564084U priority Critical patent/JPS6133443U/ja
Publication of JPS6133443U publication Critical patent/JPS6133443U/ja
Application granted granted Critical
Publication of JPH0249715Y2 publication Critical patent/JPH0249715Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Stacking Of Articles And Auxiliary Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP11564084U 1984-07-28 1984-07-28 ウエハ−移載装置 Granted JPS6133443U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11564084U JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11564084U JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Publications (2)

Publication Number Publication Date
JPS6133443U true JPS6133443U (ja) 1986-02-28
JPH0249715Y2 JPH0249715Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30674601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11564084U Granted JPS6133443U (ja) 1984-07-28 1984-07-28 ウエハ−移載装置

Country Status (1)

Country Link
JP (1) JPS6133443U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021143A (ja) * 1988-03-11 1990-01-05 Toshiba Corp 半導体ウェハのピッチ切換え装置
JPH0312216A (ja) * 1989-06-09 1991-01-21 Toshiba Corp 防湿庫

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137960A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Commodity transfer unit
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137960A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Commodity transfer unit
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021143A (ja) * 1988-03-11 1990-01-05 Toshiba Corp 半導体ウェハのピッチ切換え装置
JPH0312216A (ja) * 1989-06-09 1991-01-21 Toshiba Corp 防湿庫

Also Published As

Publication number Publication date
JPH0249715Y2 (enrdf_load_stackoverflow) 1990-12-27

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