JPH0238925Y2 - - Google Patents
Info
- Publication number
- JPH0238925Y2 JPH0238925Y2 JP3241184U JP3241184U JPH0238925Y2 JP H0238925 Y2 JPH0238925 Y2 JP H0238925Y2 JP 3241184 U JP3241184 U JP 3241184U JP 3241184 U JP3241184 U JP 3241184U JP H0238925 Y2 JPH0238925 Y2 JP H0238925Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- deposited metal
- filament
- vapor deposition
- electron impact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 description 12
- 230000008021 deposition Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3241184U JPS60143770U (ja) | 1984-03-07 | 1984-03-07 | 電子衝撃型蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3241184U JPS60143770U (ja) | 1984-03-07 | 1984-03-07 | 電子衝撃型蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60143770U JPS60143770U (ja) | 1985-09-24 |
| JPH0238925Y2 true JPH0238925Y2 (cs) | 1990-10-19 |
Family
ID=30533899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3241184U Granted JPS60143770U (ja) | 1984-03-07 | 1984-03-07 | 電子衝撃型蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143770U (cs) |
-
1984
- 1984-03-07 JP JP3241184U patent/JPS60143770U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60143770U (ja) | 1985-09-24 |
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