JPH0238441Y2 - - Google Patents

Info

Publication number
JPH0238441Y2
JPH0238441Y2 JP1986144689U JP14468986U JPH0238441Y2 JP H0238441 Y2 JPH0238441 Y2 JP H0238441Y2 JP 1986144689 U JP1986144689 U JP 1986144689U JP 14468986 U JP14468986 U JP 14468986U JP H0238441 Y2 JPH0238441 Y2 JP H0238441Y2
Authority
JP
Japan
Prior art keywords
substrate
cup
nozzle
developer
scattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986144689U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350125U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986144689U priority Critical patent/JPH0238441Y2/ja
Publication of JPS6350125U publication Critical patent/JPS6350125U/ja
Application granted granted Critical
Publication of JPH0238441Y2 publication Critical patent/JPH0238441Y2/ja
Expired legal-status Critical Current

Links

JP1986144689U 1986-09-19 1986-09-19 Expired JPH0238441Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986144689U JPH0238441Y2 (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986144689U JPH0238441Y2 (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Publications (2)

Publication Number Publication Date
JPS6350125U JPS6350125U (enrdf_load_stackoverflow) 1988-04-05
JPH0238441Y2 true JPH0238441Y2 (enrdf_load_stackoverflow) 1990-10-17

Family

ID=31055526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986144689U Expired JPH0238441Y2 (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPH0238441Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123731A (ja) * 1982-01-19 1983-07-23 Toshiba Corp 半導体処理装置
JPS59134829A (ja) * 1983-01-22 1984-08-02 Nec Corp 半導体スプレ−現像装置

Also Published As

Publication number Publication date
JPS6350125U (enrdf_load_stackoverflow) 1988-04-05

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