JPH0238439Y2 - - Google Patents

Info

Publication number
JPH0238439Y2
JPH0238439Y2 JP1985067415U JP6741585U JPH0238439Y2 JP H0238439 Y2 JPH0238439 Y2 JP H0238439Y2 JP 1985067415 U JP1985067415 U JP 1985067415U JP 6741585 U JP6741585 U JP 6741585U JP H0238439 Y2 JPH0238439 Y2 JP H0238439Y2
Authority
JP
Japan
Prior art keywords
tank
processing
liquid
treatment
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985067415U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61183528U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985067415U priority Critical patent/JPH0238439Y2/ja
Publication of JPS61183528U publication Critical patent/JPS61183528U/ja
Application granted granted Critical
Publication of JPH0238439Y2 publication Critical patent/JPH0238439Y2/ja
Expired legal-status Critical Current

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  • Weting (AREA)
JP1985067415U 1985-05-09 1985-05-09 Expired JPH0238439Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985067415U JPH0238439Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985067415U JPH0238439Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Publications (2)

Publication Number Publication Date
JPS61183528U JPS61183528U (enrdf_load_stackoverflow) 1986-11-15
JPH0238439Y2 true JPH0238439Y2 (enrdf_load_stackoverflow) 1990-10-17

Family

ID=30601219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985067415U Expired JPH0238439Y2 (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Country Status (1)

Country Link
JP (1) JPH0238439Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006147672A (ja) * 2004-11-17 2006-06-08 Dainippon Screen Mfg Co Ltd 基板回転式処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068067A (enrdf_load_stackoverflow) * 1973-10-17 1975-06-07
JPS53166861U (enrdf_load_stackoverflow) * 1977-06-01 1978-12-27
JPS5599725A (en) * 1979-01-26 1980-07-30 Matsushita Electric Ind Co Ltd Method and device for manufacturing semiconductor device
JPS5745237A (en) * 1980-09-01 1982-03-15 Fujitsu Ltd Rotary processing device
JPS5830753A (ja) * 1981-08-17 1983-02-23 Hitachi Ltd 現像液の再生処理方法
JPS5924849A (ja) * 1982-08-02 1984-02-08 Hitachi Ltd フオトマスクの洗浄方法

Also Published As

Publication number Publication date
JPS61183528U (enrdf_load_stackoverflow) 1986-11-15

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