JPH0237689B2 - - Google Patents

Info

Publication number
JPH0237689B2
JPH0237689B2 JP59210052A JP21005284A JPH0237689B2 JP H0237689 B2 JPH0237689 B2 JP H0237689B2 JP 59210052 A JP59210052 A JP 59210052A JP 21005284 A JP21005284 A JP 21005284A JP H0237689 B2 JPH0237689 B2 JP H0237689B2
Authority
JP
Japan
Prior art keywords
ipa
developer
material layer
resist material
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59210052A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6188526A (ja
Inventor
Juji Hamada
Tetsuhiro Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP21005284A priority Critical patent/JPS6188526A/ja
Publication of JPS6188526A publication Critical patent/JPS6188526A/ja
Publication of JPH0237689B2 publication Critical patent/JPH0237689B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP21005284A 1984-10-05 1984-10-05 ポジ型微細加工法 Granted JPS6188526A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21005284A JPS6188526A (ja) 1984-10-05 1984-10-05 ポジ型微細加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21005284A JPS6188526A (ja) 1984-10-05 1984-10-05 ポジ型微細加工法

Publications (2)

Publication Number Publication Date
JPS6188526A JPS6188526A (ja) 1986-05-06
JPH0237689B2 true JPH0237689B2 (enrdf_load_html_response) 1990-08-27

Family

ID=16583009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21005284A Granted JPS6188526A (ja) 1984-10-05 1984-10-05 ポジ型微細加工法

Country Status (1)

Country Link
JP (1) JPS6188526A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328851A (ja) * 1988-05-24 1991-02-07 Toppan Printing Co Ltd 電子ビームレジストのパターン形成方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026220B2 (ja) * 1977-07-19 1985-06-22 三菱電機株式会社 静電記録装置用搬送ロ−ラ
JPS5739049A (en) * 1980-08-21 1982-03-04 Sumitomo Metal Ind Ltd Manufacture of seamless eccentric reducer tube joint

Also Published As

Publication number Publication date
JPS6188526A (ja) 1986-05-06

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