JPH0232738B2 - - Google Patents

Info

Publication number
JPH0232738B2
JPH0232738B2 JP57103278A JP10327882A JPH0232738B2 JP H0232738 B2 JPH0232738 B2 JP H0232738B2 JP 57103278 A JP57103278 A JP 57103278A JP 10327882 A JP10327882 A JP 10327882A JP H0232738 B2 JPH0232738 B2 JP H0232738B2
Authority
JP
Japan
Prior art keywords
sample
objective lens
aperture
moving mechanism
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57103278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58128645A (ja
Inventor
Toshikazu Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57103278A priority Critical patent/JPS58128645A/ja
Publication of JPS58128645A publication Critical patent/JPS58128645A/ja
Publication of JPH0232738B2 publication Critical patent/JPH0232738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57103278A 1982-06-16 1982-06-16 透過結像型電子顕微鏡 Granted JPS58128645A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57103278A JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57103278A JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS58128645A JPS58128645A (ja) 1983-08-01
JPH0232738B2 true JPH0232738B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=14349884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57103278A Granted JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS58128645A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55100658U (enrdf_load_stackoverflow) * 1978-12-29 1980-07-12

Also Published As

Publication number Publication date
JPS58128645A (ja) 1983-08-01

Similar Documents

Publication Publication Date Title
JP5307582B2 (ja) 電子顕微鏡
JPH0594798A (ja) 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
JPS614142A (ja) 電子顕微鏡
JP2007504606A (ja) 粒子光学装置
US6140645A (en) Transmission electron microscope having energy filter
JPH0232738B2 (enrdf_load_stackoverflow)
JPH03134944A (ja) 電子線装置
JPH05160012A (ja) 電子線縮小転写装置
JPH01319237A (ja) 電子顕微鏡
JP3112546B2 (ja) 粒子線装置
JPH11154480A (ja) 電子線強度測定装置および電子顕微鏡
JPS6231473B2 (enrdf_load_stackoverflow)
JPH03138841A (ja) 走査形電子顕微鏡
JPH0696710A (ja) 自動焦点合わせ機能を備えた電子顕微鏡
JPS586267B2 (ja) 走査電子顕微鏡
JPS63187542A (ja) イオンマイクロビ−ム装置
JPS60193248A (ja) 電子線装置の電子線照射方法
JPH04336B2 (enrdf_load_stackoverflow)
JPS61193349A (ja) 電子顕微鏡における電子線照射方法
JPH0234750Y2 (enrdf_load_stackoverflow)
JPS6029187B2 (ja) 電子顕微鏡
JPS589545B2 (ja) デンシケンビキヨウニオケルタイブツレンズノ ヒテンシユウサホセイホウホウ
JPH0227492Y2 (enrdf_load_stackoverflow)
JPS6328518Y2 (enrdf_load_stackoverflow)
JPS61250950A (ja) 電子顕微鏡の高精度焦点合せ装置