JPS58128645A - 透過結像型電子顕微鏡 - Google Patents

透過結像型電子顕微鏡

Info

Publication number
JPS58128645A
JPS58128645A JP57103278A JP10327882A JPS58128645A JP S58128645 A JPS58128645 A JP S58128645A JP 57103278 A JP57103278 A JP 57103278A JP 10327882 A JP10327882 A JP 10327882A JP S58128645 A JPS58128645 A JP S58128645A
Authority
JP
Japan
Prior art keywords
objective lens
sample
aperture
optical axis
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57103278A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232738B2 (enrdf_load_stackoverflow
Inventor
Toshikazu Honda
本田　敏和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57103278A priority Critical patent/JPS58128645A/ja
Publication of JPS58128645A publication Critical patent/JPS58128645A/ja
Publication of JPH0232738B2 publication Critical patent/JPH0232738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57103278A 1982-06-16 1982-06-16 透過結像型電子顕微鏡 Granted JPS58128645A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57103278A JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57103278A JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS58128645A true JPS58128645A (ja) 1983-08-01
JPH0232738B2 JPH0232738B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=14349884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57103278A Granted JPS58128645A (ja) 1982-06-16 1982-06-16 透過結像型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS58128645A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55100658U (enrdf_load_stackoverflow) * 1978-12-29 1980-07-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55100658U (enrdf_load_stackoverflow) * 1978-12-29 1980-07-12

Also Published As

Publication number Publication date
JPH0232738B2 (enrdf_load_stackoverflow) 1990-07-23

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