JPH0230211Y2 - - Google Patents

Info

Publication number
JPH0230211Y2
JPH0230211Y2 JP1985185980U JP18598085U JPH0230211Y2 JP H0230211 Y2 JPH0230211 Y2 JP H0230211Y2 JP 1985185980 U JP1985185980 U JP 1985185980U JP 18598085 U JP18598085 U JP 18598085U JP H0230211 Y2 JPH0230211 Y2 JP H0230211Y2
Authority
JP
Japan
Prior art keywords
workpiece
polishing
holding head
vacuum
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985185980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6295863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985185980U priority Critical patent/JPH0230211Y2/ja
Publication of JPS6295863U publication Critical patent/JPS6295863U/ja
Application granted granted Critical
Publication of JPH0230211Y2 publication Critical patent/JPH0230211Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1985185980U 1985-12-04 1985-12-04 Expired JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985185980U JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985185980U JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6295863U JPS6295863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-18
JPH0230211Y2 true JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-14

Family

ID=31135116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985185980U Expired JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH0230211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155494A (en) * 1976-06-21 1977-12-23 Nippon Telegr & Teleph Corp <Ntt> Process for w orking parallel plane of wafer

Also Published As

Publication number Publication date
JPS6295863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-18

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