JPH0228776B2 - - Google Patents

Info

Publication number
JPH0228776B2
JPH0228776B2 JP60025769A JP2576985A JPH0228776B2 JP H0228776 B2 JPH0228776 B2 JP H0228776B2 JP 60025769 A JP60025769 A JP 60025769A JP 2576985 A JP2576985 A JP 2576985A JP H0228776 B2 JPH0228776 B2 JP H0228776B2
Authority
JP
Japan
Prior art keywords
clean room
duct
suction hood
local suction
local
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60025769A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61186747A (ja
Inventor
Toshito Takenami
Toshihiko Yamazaki
Masayuki Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Engineering and Construction Co Ltd filed Critical Hitachi Plant Engineering and Construction Co Ltd
Priority to JP60025769A priority Critical patent/JPS61186747A/ja
Publication of JPS61186747A publication Critical patent/JPS61186747A/ja
Publication of JPH0228776B2 publication Critical patent/JPH0228776B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60025769A 1985-02-13 1985-02-13 クリ−ンル−ム Granted JPS61186747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60025769A JPS61186747A (ja) 1985-02-13 1985-02-13 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60025769A JPS61186747A (ja) 1985-02-13 1985-02-13 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS61186747A JPS61186747A (ja) 1986-08-20
JPH0228776B2 true JPH0228776B2 (enrdf_load_stackoverflow) 1990-06-26

Family

ID=12175048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60025769A Granted JPS61186747A (ja) 1985-02-13 1985-02-13 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS61186747A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6399434A (ja) * 1986-10-15 1988-04-30 Shin Nippon Kucho Kk クリ−ンル−ムにおける天井構造
JPH0820091B2 (ja) * 1987-03-02 1996-03-04 三機工業株式会社 清浄室装置
JP3850064B2 (ja) * 1996-04-11 2006-11-29 株式会社ルネサステクノロジ クリーンルーム内における機器の設置構造

Also Published As

Publication number Publication date
JPS61186747A (ja) 1986-08-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees