JPH0228776B2 - - Google Patents

Description

[Detailed Description of the Invention] A. Field of Industrial Application This invention relates to a clean room equipped with an air outlet on the ceiling and a suction inlet on the floor, and particularly relates to a local suction hood that performs local cleaning within the clean room. Regarding clean rooms equipped with

B. Prior Art Industrial clean rooms are widely used to improve manufacturing yields and product reliability, which are caused by dust adhesion to products, by reducing indoor dust as much as possible.

FIG. 4 shows a sectional view of a conventional clean room.

In a conventional clean room 1, air sent from a blower 3 above the ceiling 2 passes through a high-performance filter 4 and is blown out as clean air to clean the room as a downflow. The air is discharged into the intake chamber 6 from the floor surface made of a ventilation plate 5 such as a plate. Some of them are exhaust duct 7
Most of the air that is exhausted outside is sent to the attic 10 through a circulation duct 8 installed inside the wall and an air conditioner 9, and then passes through the blower 3 and high-performance filter 4 again to the clean room 1. Supplied as clean air.

In such a configuration, dust generated by indoor workers is carried by the indoor airflow and is eventually sucked into the ventilation plate 5. However, in the conventional downflow method, when a worker works near the workbench 11, the airflow that collides with the worker becomes a vortex on the workbench 11, causing dust to adhere to the products placed on the workbench 11. However, there were drawbacks that reduced product yield and product reliability.

C. Problems to be Solved by the Invention The purpose of the present invention is to eliminate the drawbacks of the prior art described above, to prevent dust generated from work from adhering to the product as much as possible, and to perform local cleaning. It is in providing a clean room.

D. Means for Solving the Problem This invention provides a local suction hood below the ventilation plate in the work area, so that the suction wind speed increases locally, and the airflow is directed from the work table to the underfloor direction of the work area. It is designed to flow.

E. Embodiment FIG. 1 is a sectional view of one embodiment of a clean room according to the present invention, and FIGS. 2 and 3 are sectional views of other embodiments.

The difference from a conventional clean room is that a local suction hood 12 is provided in contact with the lower surface of the ventilation plate 5 in the working area and connected to a duct 13, and an exhaust fan 14 is further provided at the end of this hood. As a result, the suction wind speed in the work area is 15% lower than the suction wind speed on other floor surfaces.
~2x faster.

In the above embodiment, the local suction hood 12 was fixedly provided under the work area, but as shown in FIG. 2, the duct 13 connecting the local suction hood 12 and the exhaust fan 14 may have a flexible structure. good. This allows it to be moved to any location under the floor in the work area.

As shown in Fig. 3, a duct 13 is installed in advance in the underfloor space 6 at a position that will become the work area, and a plurality of connection ports 15 for attaching the local suction hood 12 are provided, and the duct 13 is moved under the floor where the worker is. It is also possible to have a structure that can be used.

In this case, a damper 16 is provided at the connection port 15 so that the air volume can be adjusted as desired.

In such a configuration, the airflow that collides with the worker directly flows directly below. Furthermore, since the airflow above the workbench 11 flows toward the worker, dust generated by the worker is quickly discharged to the floor below without adhering to the product placed on the workbench 11. It is possible to prevent dust from adhering to the surface.

F. Effects of the Invention In this invention, a local suction hood is attached below the ventilation plate to guide the flow to the duct and exhaust fan to increase the local flow velocity, thereby achieving localized cleaning and improving worker safety. It is possible to prevent dust generated from the product from adhering to the product.

[Brief explanation of drawings]

FIG. 1 is a sectional view of one embodiment of a clean room according to the present invention, FIGS. 2 and 3 are sectional views of other embodiments, and FIG. 4 is a sectional view of a conventional clean room. 1...Clean room, 2...Ceiling, 3...Blower,
4...high performance filter, 5...ventilation plate, 6...intake chamber,
11...Workbench, 12...Local suction hood, 13...Duct, 14...Exhaust fan, 15...Connection port, 16...Damper.

Claims (1)

[Claims] 1. In a clean room equipped with a circulating air purification device and having an intake chamber separated by a ventilation plate, a local suction hood connected below the ventilation plate;
A clean room characterized by comprising a duct connected to this local suction hood and an exhaust fan connected to this duct. 2. The clean room according to claim 1, wherein the duct connected to the local suction hood is a flexible duct whose length can be arbitrarily adjusted. 3. The clean room according to claim 1, wherein a plurality of connection ports are provided in the duct connected to the local suction hood, and an air flow rate adjustment damper is provided in each of the connection ports.