JPS5812937A - Energy-saving type clean room - Google Patents

Abstract

PURPOSE:To secure the purification degree of a working zone and attempt to spare energy by providing a variable slit width blow-off port for constricting air blowing off from a part of the air blow-off surface of the laminer type clean room toward a specific working zone. CONSTITUTION:Air sucked up from a ventilation floor 22 into a subfloor space enters into an air conditioner 27 together with the outside air, and is blown off into a cleam room space 31 from the blow-off surface 1 extending a filter 22 through an air chamber 30 by a blower 29. The entire surface of the blow-off surface 1 is constituted so that air currents of equal speed are blown off from the entire surface thereof, regardless of a part of the surface 2 fitted with a variable slit width blow-off port N or other surface. By this arrangement, even if the system is driven by decreasing the speed of air flow, the purification defree in the working zone 23 can be sufficiently secured by the variable slit width blow-off port N.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an energy-saving clean room in which the required air volume of a laminar flow clean room is reduced to a large rlJ without impairing the function of the laminar flow clean room.

A laminar flow clean room that blows air in a laminar manner vertically or horizontally blows out clean air so that the blowing speed is uniform across the back surface of the blowing surface, and a This air is drawn in uniformly from the suction surface.

Normally, the average wind speed of the blown air current is about Q, 5 m/B.

In this way, the conventional laminar flow type clean room forms a laminar flow throughout the clean room space, thereby impairing the cleanliness of the entire space.

However, even if the entire surface is cleaned with an average air flow of about 0.5rn//B, in reality, the working area of the clean room, such as the surgical area, precision processing and chemical processing workbench, etc. This is often a part of the entire clean room space, and it is often necessary to ensure cleanliness in this work area.

The present invention was made with the aim of lowering the overall air volume while ensuring cleanliness in this work area, thereby saving energy in the drive device. This special purpose is effectively achieved by combining a variable slit width outlet. By using this variable slit width outlet, the air volume can be reduced to about 60 to 8096 compared to before.
This also ensures sufficient cleanliness in the work area.

To explain the present invention in detail with reference to the drawings, FIG. 1 shows a vertical laminar flow clean room according to the present invention,
A variable slit width outlet N is attached to a surface 2 of a part of the outlet surface 1. In Fig. 1, 20 is an airtight structure, 21 is a high-performance filter, 22 is a breathable floor, 2'5 is a working area, 24 is an outside air intake port, 25 is a pre-filter, 126 is an air volume adjustment damper, and 27 is a Air conditioner, 29, blower, 30
31 indicates a blown air chamber, and 31 indicates a clean room space. Further, FIG. 2 shows a vertical laminar flow type clean room similar to FIG. 1 except that a clean room exhaust port 32 and a process exhaust device 36 are provided. The blower 29 is a blower whose blowing air volume can be arbitrarily controlled, and is, for example, a variable speed blower, a variable pitch blower, an intake guide vane control blower, or the like.

The air uniformly sucked into the underfloor space from the ventilation floor 22 enters the air conditioner 27 along with the required amount of outside air, and is passed through the air chamber 60 by the blower 29 to the blowing surface where the high performance filter 22 is stretched over the entire surface. From 1 to 1 as a constant velocity blowing air flow.
7- It is blown out into the room space 31. That is, the entire surface of the blowing surface 1 has a structure such that a uniform airflow is blown out, whether it is on the part 2 where the variable slit width blowing outlet N is attached or on other surfaces. This is exactly the uniform velocity generation surface structure of a conventional laminar flow clean room.

However, the clean air blown from this Suita surface 1 has a wind speed that is lower than the conventionally required wind speed of about 0.5 m/A.
Even if the wind speed is reduced to a range of 0.02 to 0.35 m/s, the cleanliness in the working area 23 can be sufficiently ensured by the variable slit width outlet N. Even in other areas, turbulent diffusion and retention of dust can be sufficiently prevented. This is because only the air blown out from one part of the surface 2 is converged by the variable slit width outlet N and then blown out toward the work area 23.

Figure 6 shows the variable slit width outlet N in Figure 1 or Figure 2.
FIG. 4 is an exploded view of the variable slit width outlet N. As shown in these figures, the air outlet N is a nozzle attached to the air outlet side of a part of the surface 2 of the air blowing surface 1, and is connected to a side plate 3 that extends toward the Suita side in a direction substantially perpendicular to the air outlet direction. 4, and inclined plates 6 and 7, which are inclined plates extending from the surface 2 to the blowing side between the side plates 3 and 4, and forming a nozzle opening 5 having an opening area smaller than the opening area of the surface 2. There is. As will be described later, angle variable locking holes 12 for the inclined plate 6 are arranged in a row in the side plates 3 and 4. Note that 11 is an elastic packing, and 21 is a filter.

The inclined plates 6 and 7 have an inclination so that the air passing through a portion of the surface 2 is blown out at a higher speed and in a different direction. More specifically, the inclined plates 6 and 7 are curved plates having mutually different curvatures, and the direction of the nozzle opening 5 is deviated from the blowing direction from the surface 2. For this reason, the inclined plate 7 protrudes toward the air outlet side of the surface 2 in such a proportion that it closes most of the opening area of the surface 2, and it is preferable that the extent of this overhang exceeds at least the center of the surface 2 to a portion h. .

Then, the projecting surface of this inclined plate 7 suddenly reverses its direction, so that the direction of the nozzle opening 5 is inclined toward this inclined plate 7 itself. It does not have a special curved surface like that, but has a gentle curve.

The double-ended swash plates 6 and 7 are connected to the side plates 3 and 4. That is, by inserting bolts into bolt holes provided in the side plates 3 and 4, and passing these bolts through bolt locking holes or grooves 13 to 16 provided in the double-ended swash plates 6 and 7, the connection between the two is performed. It will be done.

At that time, in the side plates 3 and 4, the inclined plate 6 is
It has a wide area that can be locked even if it rotates to some extent around the joint point (position where the packing 11 exists), and the variable angle locking hole 12 is provided in this part.
are arranged in rows or in grooves. As a result, the mounting angle of the inclined plate 6 can be freely adjusted.
By adjusting this mounting angle, the speed and direction of the airflow blown out from the nozzle port 5 can be controlled. During the actual assembly, first join the side plate work 2.4 and the inclined plates 6, 7, and then install this assembly at an appropriate location on the clean room air outlet surface. Adjustments can be made freely even after installation.

The number and position of the variable slit width outlets N can be appropriately determined depending on the size of the clean room and the size and position of the work area 25.

In other words, without requiring any changes to the basic structure of the laminar flow clean room itself, the variable slit width Suita outlet N is assigned <i according to the working area 23, and the discharge amount of the blower 29 is adjusted to the variable slit width Suita outlet N. What is necessary is to reduce it to about 60-80y). In this way, even if the discharge amount of the blower 29 is reduced, the cleanliness in the work area 26 can be sufficiently ensured, and the turbulent diffusion and accumulation of indoor dust particles outside the main control head can be prevented by the variable slit width. This can be sufficiently prevented by blowing air from another surface where the blower outlet N is not present.

In this way, the clean room of the present invention maintains the cleanliness of the target area at the same level as conventional laminar flow clean rooms, while maintaining a cleanliness level of approximately 0.5 myB, which was required compared to conventional laminar flow clean rooms.
(7) It is possible to lower the average air flow to about 0.3 to 0.4 m/m, which can reduce the average wind speed of the entire clean room by about 20 to 40%. Normally, the power cost is approximately proportional to the cube of the air volume ratio, so the power cost of the clean room of the present invention is 50 to 50% lower than that of the conventional one.
This means that it is possible to save 70% or more, and extremely energy saving is achieved. Moreover, the variable slit width outlet N according to the present invention is simple in structure and assembly, and the blowing direction can be changed freely, so it is easy to deal with changes in the size and position of the work area. Changes to energy-saving operation of clean rooms can be easily made.

[Brief explanation of drawings]

FIG. 1 is an overall view showing one embodiment of the clean room of the present invention, FIG. 2 is an overall view similarly showing another embodiment, and FIG. 3 is a partial enlarged sectional view of the variable slit width blowout day of FIG. 1. , 4th
The figure is an exploded view of the variable air outlet shown in FIG. 6. 1...Blowout surface 2...Part of the blowout surface 3.4...Side plate 5...Nozzle port 6.7...Slanted plate 12...Angle variable locking hole 21...・High performance filter 22... Ventilation floor 23... Working area 27... Air conditioner 29... Blower 31... Clean room space Applicant: Takasago Thermal Engineering Co., Ltd. Agent Kenga Wada

Claims (2)

[Claims] (1) On one of the air blowing surfaces of a laminar flow clean room, a variable slit width Suita mouth is used to converge the air blown from this one surface, and its blowing direction is specified in the room space. An energy-saving clean room characterized by being installed facing the work area. (2) The variable slit width outlet has side plates 3 and 4 extending from the outlet surface in a direction substantially perpendicular to the outlet direction, and these side plates 3 and 4.
and inclined plates 6 and 7 arranged so as to be inclined from the outlet surface to the outlet side, and at least one of the inclined plates 6 and 7 is connected to the side plate 3.
4. The clean room according to claim 1, wherein the clean room has a locking structure that allows the angle of inclination to be freely changed with respect to the angles of inclination of the clean room.