JPH0226798B2 - - Google Patents

Info

Publication number

JPH0226798B2

JPH0226798B2 JP56115040A JP11504081A JPH0226798B2 JP H0226798 B2 JPH0226798 B2 JP H0226798B2 JP 56115040 A JP56115040 A JP 56115040A JP 11504081 A JP11504081 A JP 11504081A JP H0226798 B2 JPH0226798 B2 JP H0226798B2

Authority

JP

Japan

Prior art keywords

paste

resistor

amorphous glass

circuit

insulating

Prior art date

1981-07-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000011521 glass Substances 0.000 claims description 64
• 239000004020 conductor Substances 0.000 claims description 34
• 239000000843 powder Substances 0.000 claims description 17
• 239000000758 substrate Substances 0.000 claims description 16
• 239000000203 mixture Substances 0.000 claims description 14
• 238000004519 manufacturing process Methods 0.000 claims description 8
• 238000010304 firing Methods 0.000 claims description 6
• 229910052751 metal Inorganic materials 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 4
• 230000015572 biosynthetic process Effects 0.000 claims description 2
• 239000010410 layer Substances 0.000 description 40
• 239000002245 particle Substances 0.000 description 22
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 17
• 238000010438 heat treatment Methods 0.000 description 10
• 239000011810 insulating material Substances 0.000 description 10
• 239000000463 material Substances 0.000 description 10
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 8
• 238000000034 method Methods 0.000 description 8
• 238000007639 printing Methods 0.000 description 8
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
• 238000009413 insulation Methods 0.000 description 7
• 239000011229 interlayer Substances 0.000 description 7
• 239000013078 crystal Substances 0.000 description 6
• 230000007547 defect Effects 0.000 description 6
• 239000010419 fine particle Substances 0.000 description 6
• 239000012212 insulator Substances 0.000 description 6
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
• 238000005245 sintering Methods 0.000 description 6
• KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
• 239000011230 binding agent Substances 0.000 description 5
• 239000004065 semiconductor Substances 0.000 description 5
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
• 239000000395 magnesium oxide Substances 0.000 description 4
• 150000004645 aluminates Chemical class 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 3
• 229910052681 coesite Inorganic materials 0.000 description 3
• 229910052593 corundum Inorganic materials 0.000 description 3
• 229910052906 cristobalite Inorganic materials 0.000 description 3
• 238000004898 kneading Methods 0.000 description 3
• 239000011777 magnesium Substances 0.000 description 3
• 239000002923 metal particle Substances 0.000 description 3
• 238000002156 mixing Methods 0.000 description 3
• 229910052697 platinum Inorganic materials 0.000 description 3
• 239000000377 silicon dioxide Substances 0.000 description 3
• 235000012239 silicon dioxide Nutrition 0.000 description 3
• 229910000679 solder Inorganic materials 0.000 description 3
• 229910052682 stishovite Inorganic materials 0.000 description 3
• 229910052905 tridymite Inorganic materials 0.000 description 3
• 229910001845 yogo sapphire Inorganic materials 0.000 description 3
• DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 2
• 229910015999 BaAl Inorganic materials 0.000 description 2
• 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
• 229910020068 MgAl Inorganic materials 0.000 description 2
• KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
• BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
• 229910004283 SiO 4 Inorganic materials 0.000 description 2
• 229910010413 TiO 2 Inorganic materials 0.000 description 2
• 229910006501 ZrSiO Inorganic materials 0.000 description 2
• 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
• 229910052737 gold Inorganic materials 0.000 description 2
• 239000010931 gold Substances 0.000 description 2
• 239000013081 microcrystal Substances 0.000 description 2
• 239000002244 precipitate Substances 0.000 description 2
• 239000002994 raw material Substances 0.000 description 2
• 239000002904 solvent Substances 0.000 description 2
• 229910052596 spinel Inorganic materials 0.000 description 2
• 239000011029 spinel Substances 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• GOJCZVPJCKEBQV-UHFFFAOYSA-N Butyl phthalyl butylglycolate Chemical compound CCCCOC(=O)COC(=O)C1=CC=CC=C1C(=O)OCCCC GOJCZVPJCKEBQV-UHFFFAOYSA-N 0.000 description 1
• BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
• 229910018068 Li 2 O Inorganic materials 0.000 description 1
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
• -1 TiO 2 Chemical class 0.000 description 1
• 238000010521 absorption reaction Methods 0.000 description 1
• 238000007605 air drying Methods 0.000 description 1
• 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
• 229910000323 aluminium silicate Inorganic materials 0.000 description 1
• 239000005407 aluminoborosilicate glass Substances 0.000 description 1
• 229910052661 anorthite Inorganic materials 0.000 description 1
• QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
• 239000002585 base Substances 0.000 description 1
• 229910052797 bismuth Inorganic materials 0.000 description 1
• 230000000740 bleeding effect Effects 0.000 description 1
• 230000005587 bubbling Effects 0.000 description 1
• ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 229910001597 celsian Inorganic materials 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• 238000005336 cracking Methods 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
• HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000005187 foaming Methods 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
• 238000010030 laminating Methods 0.000 description 1
• 229910052745 lead Inorganic materials 0.000 description 1
• PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
• 229910052912 lithium silicate Inorganic materials 0.000 description 1
• 229910052749 magnesium Inorganic materials 0.000 description 1
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
• VASIZKWUTCETSD-UHFFFAOYSA-N manganese(II) oxide Inorganic materials [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 229910044991 metal oxide Inorganic materials 0.000 description 1
• 150000004706 metal oxides Chemical class 0.000 description 1
• 239000012046 mixed solvent Substances 0.000 description 1
• 229910052750 molybdenum Inorganic materials 0.000 description 1
• 239000011733 molybdenum Substances 0.000 description 1
• 239000004570 mortar (masonry) Substances 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 229910000510 noble metal Inorganic materials 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 229910052763 palladium Inorganic materials 0.000 description 1
• 239000010970 precious metal Substances 0.000 description 1
• 239000000047 product Substances 0.000 description 1
• 150000004760 silicates Chemical class 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 239000004332 silver Substances 0.000 description 1
• 239000002002 slurry Substances 0.000 description 1
• 229910052708 sodium Inorganic materials 0.000 description 1
• IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 239000010937 tungsten Substances 0.000 description 1
• 229920002554 vinyl polymer Polymers 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
• 229910052845 zircon Inorganic materials 0.000 description 1
• GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1