JPH0225501B2 - - Google Patents

Info

Publication number
JPH0225501B2
JPH0225501B2 JP56115030A JP11503081A JPH0225501B2 JP H0225501 B2 JPH0225501 B2 JP H0225501B2 JP 56115030 A JP56115030 A JP 56115030A JP 11503081 A JP11503081 A JP 11503081A JP H0225501 B2 JPH0225501 B2 JP H0225501B2
Authority
JP
Japan
Prior art keywords
vapor
developer
development
supply nozzle
developing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56115030A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5817443A (ja
Inventor
Tomio Nakazawa
Kazuya Kadota
Yoshimichi Hirobe
Maki Nagao
Hideaki Azuma
Yoichi Tagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Microcomputer System Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Microcomputer System Ltd, Hitachi Ltd filed Critical Hitachi Microcomputer System Ltd
Priority to JP11503081A priority Critical patent/JPS5817443A/ja
Publication of JPS5817443A publication Critical patent/JPS5817443A/ja
Publication of JPH0225501B2 publication Critical patent/JPH0225501B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11503081A 1981-07-24 1981-07-24 フオトレジスト現像方法および装置 Granted JPS5817443A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11503081A JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11503081A JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Publications (2)

Publication Number Publication Date
JPS5817443A JPS5817443A (ja) 1983-02-01
JPH0225501B2 true JPH0225501B2 (enrdf_load_stackoverflow) 1990-06-04

Family

ID=14652474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11503081A Granted JPS5817443A (ja) 1981-07-24 1981-07-24 フオトレジスト現像方法および装置

Country Status (1)

Country Link
JP (1) JPS5817443A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3534414A1 (de) * 1985-09-27 1987-04-02 Standard Elektrik Lorenz Ag Verfahren und vorrichtung zur erzeugung einer schwarzmatrixschicht
JPS63250125A (ja) * 1987-04-06 1988-10-18 Nec Yamagata Ltd 半導体装置の製造方法
EP0443796A3 (en) * 1990-02-19 1992-03-04 Hitachi Chemical Co., Ltd. Development process
JPH07105336B2 (ja) * 1992-08-27 1995-11-13 日本電気株式会社 レジスト現像方法
US6025118A (en) * 1998-05-12 2000-02-15 Sony Corporation Glassmastering photoresist read after write method and system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5536182B2 (enrdf_load_stackoverflow) * 1973-10-15 1980-09-19

Also Published As

Publication number Publication date
JPS5817443A (ja) 1983-02-01

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