JPS5536182B2 - - Google Patents

Info

Publication number
JPS5536182B2
JPS5536182B2 JP11605473A JP11605473A JPS5536182B2 JP S5536182 B2 JPS5536182 B2 JP S5536182B2 JP 11605473 A JP11605473 A JP 11605473A JP 11605473 A JP11605473 A JP 11605473A JP S5536182 B2 JPS5536182 B2 JP S5536182B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11605473A
Other languages
Japanese (ja)
Other versions
JPS5067577A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11605473A priority Critical patent/JPS5536182B2/ja
Publication of JPS5067577A publication Critical patent/JPS5067577A/ja
Publication of JPS5536182B2 publication Critical patent/JPS5536182B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photographic Processing Devices Using Wet Methods (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11605473A 1973-10-15 1973-10-15 Expired JPS5536182B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11605473A JPS5536182B2 (enrdf_load_stackoverflow) 1973-10-15 1973-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11605473A JPS5536182B2 (enrdf_load_stackoverflow) 1973-10-15 1973-10-15

Publications (2)

Publication Number Publication Date
JPS5067577A JPS5067577A (enrdf_load_stackoverflow) 1975-06-06
JPS5536182B2 true JPS5536182B2 (enrdf_load_stackoverflow) 1980-09-19

Family

ID=14677548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11605473A Expired JPS5536182B2 (enrdf_load_stackoverflow) 1973-10-15 1973-10-15

Country Status (1)

Country Link
JP (1) JPS5536182B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105433U (enrdf_load_stackoverflow) * 1990-02-14 1991-10-31

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0143861Y2 (enrdf_load_stackoverflow) * 1980-04-17 1989-12-19
JPS5817443A (ja) * 1981-07-24 1983-02-01 Hitachi Ltd フオトレジスト現像方法および装置
JPS5852645A (ja) * 1981-09-24 1983-03-28 Hitachi Ltd 現像方法および装置
JPS59215729A (ja) * 1983-05-21 1984-12-05 Ulvac Corp 半導体もしくは磁気記録媒体等の基板の洗浄装置
JPS60117733A (ja) * 1983-11-30 1985-06-25 Canon Hanbai Kk ウエハ現像装置
JP6021608B2 (ja) * 2012-11-20 2016-11-09 新電元工業株式会社 レジスト現像装置、レジスト現像方法及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105433U (enrdf_load_stackoverflow) * 1990-02-14 1991-10-31

Also Published As

Publication number Publication date
JPS5067577A (enrdf_load_stackoverflow) 1975-06-06

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