JPH0222985Y2 - - Google Patents

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Publication number
JPH0222985Y2
JPH0222985Y2 JP1983184671U JP18467183U JPH0222985Y2 JP H0222985 Y2 JPH0222985 Y2 JP H0222985Y2 JP 1983184671 U JP1983184671 U JP 1983184671U JP 18467183 U JP18467183 U JP 18467183U JP H0222985 Y2 JPH0222985 Y2 JP H0222985Y2
Authority
JP
Japan
Prior art keywords
furnace
heat treatment
tube
heater section
treatment furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983184671U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6092826U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18467183U priority Critical patent/JPS6092826U/ja
Publication of JPS6092826U publication Critical patent/JPS6092826U/ja
Application granted granted Critical
Publication of JPH0222985Y2 publication Critical patent/JPH0222985Y2/ja
Granted legal-status Critical Current

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  • Furnace Details (AREA)
JP18467183U 1983-11-30 1983-11-30 熱処理炉 Granted JPS6092826U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18467183U JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18467183U JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Publications (2)

Publication Number Publication Date
JPS6092826U JPS6092826U (ja) 1985-06-25
JPH0222985Y2 true JPH0222985Y2 (enrdf_load_stackoverflow) 1990-06-21

Family

ID=30399354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18467183U Granted JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Country Status (1)

Country Link
JP (1) JPS6092826U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3242281B2 (ja) * 1995-03-13 2001-12-25 東京エレクトロン株式会社 熱処理装置
JP6333128B2 (ja) 2014-09-03 2018-05-30 東京エレクトロン株式会社 磁気アニール装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124955Y2 (enrdf_load_stackoverflow) * 1971-06-16 1976-06-25

Also Published As

Publication number Publication date
JPS6092826U (ja) 1985-06-25

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