JPS6092826U - 熱処理炉 - Google Patents

熱処理炉

Info

Publication number
JPS6092826U
JPS6092826U JP18467183U JP18467183U JPS6092826U JP S6092826 U JPS6092826 U JP S6092826U JP 18467183 U JP18467183 U JP 18467183U JP 18467183 U JP18467183 U JP 18467183U JP S6092826 U JPS6092826 U JP S6092826U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment furnace
tube
heater section
accommodating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18467183U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222985Y2 (enrdf_load_stackoverflow
Inventor
竹俣　不覊
徹 鶴見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18467183U priority Critical patent/JPS6092826U/ja
Publication of JPS6092826U publication Critical patent/JPS6092826U/ja
Application granted granted Critical
Publication of JPH0222985Y2 publication Critical patent/JPH0222985Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP18467183U 1983-11-30 1983-11-30 熱処理炉 Granted JPS6092826U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18467183U JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18467183U JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Publications (2)

Publication Number Publication Date
JPS6092826U true JPS6092826U (ja) 1985-06-25
JPH0222985Y2 JPH0222985Y2 (enrdf_load_stackoverflow) 1990-06-21

Family

ID=30399354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18467183U Granted JPS6092826U (ja) 1983-11-30 1983-11-30 熱処理炉

Country Status (1)

Country Link
JP (1) JPS6092826U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996028843A1 (fr) * 1995-03-13 1996-09-19 Tokyo Electron Limited Appareil de traitement thermique
JP2016054213A (ja) * 2014-09-03 2016-04-14 東京エレクトロン株式会社 磁気アニール装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4810193U (enrdf_load_stackoverflow) * 1971-06-16 1973-02-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4810193U (enrdf_load_stackoverflow) * 1971-06-16 1973-02-03

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996028843A1 (fr) * 1995-03-13 1996-09-19 Tokyo Electron Limited Appareil de traitement thermique
JP2016054213A (ja) * 2014-09-03 2016-04-14 東京エレクトロン株式会社 磁気アニール装置
TWI645042B (zh) * 2014-09-03 2018-12-21 日商東京威力科創股份有限公司 磁性退火裝置
US10254046B2 (en) 2014-09-03 2019-04-09 Tokyo Electron Limited Magnetic annealing apparatus

Also Published As

Publication number Publication date
JPH0222985Y2 (enrdf_load_stackoverflow) 1990-06-21

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