JPH0220142B2 - - Google Patents

Info

Publication number
JPH0220142B2
JPH0220142B2 JP58095231A JP9523183A JPH0220142B2 JP H0220142 B2 JPH0220142 B2 JP H0220142B2 JP 58095231 A JP58095231 A JP 58095231A JP 9523183 A JP9523183 A JP 9523183A JP H0220142 B2 JPH0220142 B2 JP H0220142B2
Authority
JP
Japan
Prior art keywords
film
wiring
alloy
wiring layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58095231A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59219940A (ja
Inventor
Shohei Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP9523183A priority Critical patent/JPS59219940A/ja
Publication of JPS59219940A publication Critical patent/JPS59219940A/ja
Publication of JPH0220142B2 publication Critical patent/JPH0220142B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9523183A 1983-05-30 1983-05-30 半導体装置の製造方法 Granted JPS59219940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9523183A JPS59219940A (ja) 1983-05-30 1983-05-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9523183A JPS59219940A (ja) 1983-05-30 1983-05-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59219940A JPS59219940A (ja) 1984-12-11
JPH0220142B2 true JPH0220142B2 (enExample) 1990-05-08

Family

ID=14131983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9523183A Granted JPS59219940A (ja) 1983-05-30 1983-05-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59219940A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200809C2 (de) * 1991-03-20 1996-12-12 Samsung Electronics Co Ltd Verfahren zur Bildung einer metallischen Verdrahtungsschicht in einem Halbleiterbauelement

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5380184A (en) * 1976-12-24 1978-07-15 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS59219940A (ja) 1984-12-11

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