JPH0218318B2 - - Google Patents

Info

Publication number
JPH0218318B2
JPH0218318B2 JP57036823A JP3682382A JPH0218318B2 JP H0218318 B2 JPH0218318 B2 JP H0218318B2 JP 57036823 A JP57036823 A JP 57036823A JP 3682382 A JP3682382 A JP 3682382A JP H0218318 B2 JPH0218318 B2 JP H0218318B2
Authority
JP
Japan
Prior art keywords
graphite
graphite crucible
silicon
crucible
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57036823A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58156595A (ja
Inventor
Yoshiji Aoyama
Shigeo Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP57036823A priority Critical patent/JPS58156595A/ja
Publication of JPS58156595A publication Critical patent/JPS58156595A/ja
Publication of JPH0218318B2 publication Critical patent/JPH0218318B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP57036823A 1982-03-08 1982-03-08 シリコン単結晶引上げ装置用黒鉛ルツボ Granted JPS58156595A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57036823A JPS58156595A (ja) 1982-03-08 1982-03-08 シリコン単結晶引上げ装置用黒鉛ルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57036823A JPS58156595A (ja) 1982-03-08 1982-03-08 シリコン単結晶引上げ装置用黒鉛ルツボ

Publications (2)

Publication Number Publication Date
JPS58156595A JPS58156595A (ja) 1983-09-17
JPH0218318B2 true JPH0218318B2 (OSRAM) 1990-04-25

Family

ID=12480470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57036823A Granted JPS58156595A (ja) 1982-03-08 1982-03-08 シリコン単結晶引上げ装置用黒鉛ルツボ

Country Status (1)

Country Link
JP (1) JPS58156595A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001031473A (ja) * 1999-07-21 2001-02-06 Toyo Tanso Kk 黒鉛ヒーター

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626781A (en) * 1979-08-04 1981-03-14 Hitachi Chemical Co Ltd Manufacture of siccclad graphite material
JPS5632396A (en) * 1979-08-17 1981-04-01 Toshiba Ceramics Co Ltd Silicon single crystal pulling apparatus
JPS5684381A (en) * 1979-12-04 1981-07-09 Toshiba Ceramics Co Carbon silicate material
JPS56120584A (en) * 1980-06-26 1981-09-21 Hitachi Chemical Co Ltd Manufacture of carbonnsic composite member
JPS57191292A (en) * 1981-05-19 1982-11-25 Toshiba Ceramics Co Ltd Graphite crucible for preparing single crystal of semiconductor

Also Published As

Publication number Publication date
JPS58156595A (ja) 1983-09-17

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