JPH0212139B2 - - Google Patents
Info
- Publication number
- JPH0212139B2 JPH0212139B2 JP59136114A JP13611484A JPH0212139B2 JP H0212139 B2 JPH0212139 B2 JP H0212139B2 JP 59136114 A JP59136114 A JP 59136114A JP 13611484 A JP13611484 A JP 13611484A JP H0212139 B2 JPH0212139 B2 JP H0212139B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- chemical solution
- chemical
- inert gas
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 102
- 239000007788 liquid Substances 0.000 claims description 51
- 239000011261 inert gas Substances 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 10
- 230000006866 deterioration Effects 0.000 claims description 8
- 230000002265 prevention Effects 0.000 claims description 7
- 229920006395 saturated elastomer Polymers 0.000 claims description 7
- 239000003814 drug Substances 0.000 claims description 5
- 229940079593 drug Drugs 0.000 claims description 5
- 239000000243 solution Substances 0.000 description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Weting (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13611484A JPS6115729A (ja) | 1984-06-29 | 1984-06-29 | 薬液供給方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13611484A JPS6115729A (ja) | 1984-06-29 | 1984-06-29 | 薬液供給方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6115729A JPS6115729A (ja) | 1986-01-23 |
| JPH0212139B2 true JPH0212139B2 (ko) | 1990-03-19 |
Family
ID=15167621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13611484A Granted JPS6115729A (ja) | 1984-06-29 | 1984-06-29 | 薬液供給方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6115729A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022176057A (ja) * | 2022-01-11 | 2022-11-25 | 株式会社西村ケミテック | 薬液供給装置及び薬液供給方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11244683A (ja) * | 1998-02-27 | 1999-09-14 | Japan Atom Energy Res Inst | 湿式造粒方法及び装置 |
| JP4314537B2 (ja) * | 1998-07-03 | 2009-08-19 | 関東化学株式会社 | 安全検出型薬液供給装置 |
| JP2002273113A (ja) * | 2001-03-15 | 2002-09-24 | Koganei Corp | 濾過器および薬液供給装置並びに薬液供給方法 |
| JP4255269B2 (ja) * | 2002-11-25 | 2009-04-15 | 昭和炭酸株式会社 | 超低温窒素ガス供給装置 |
| JP4558538B2 (ja) * | 2004-03-04 | 2010-10-06 | エシコン・インコーポレイテッド | 液体滅菌剤を滅菌器に送達する方法 |
| US8440139B2 (en) | 2004-03-04 | 2013-05-14 | Ethican, Inc. | Method of delivering liquid sterilant to a sterilizer |
| JP4736646B2 (ja) * | 2005-09-06 | 2011-07-27 | 横浜ゴム株式会社 | マンドレル処理液の攪拌供給装置 |
| JP6973534B2 (ja) * | 2020-03-10 | 2021-12-01 | 栗田工業株式会社 | 希薄薬液供給装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5739180A (en) * | 1980-08-18 | 1982-03-04 | Kawasaki Steel Corp | Method for adding hydrogen peroxide in continuously pickling stainless steel strip |
| JPS57171414A (en) * | 1981-04-14 | 1982-10-22 | Matsushita Electric Ind Co Ltd | Gas scrubbing apparatus |
| JPS58193725A (ja) * | 1981-12-18 | 1983-11-11 | Nec Kyushu Ltd | 半導体製造装置への有機薬品の供給方法 |
-
1984
- 1984-06-29 JP JP13611484A patent/JPS6115729A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5739180A (en) * | 1980-08-18 | 1982-03-04 | Kawasaki Steel Corp | Method for adding hydrogen peroxide in continuously pickling stainless steel strip |
| JPS57171414A (en) * | 1981-04-14 | 1982-10-22 | Matsushita Electric Ind Co Ltd | Gas scrubbing apparatus |
| JPS58193725A (ja) * | 1981-12-18 | 1983-11-11 | Nec Kyushu Ltd | 半導体製造装置への有機薬品の供給方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022176057A (ja) * | 2022-01-11 | 2022-11-25 | 株式会社西村ケミテック | 薬液供給装置及び薬液供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115729A (ja) | 1986-01-23 |
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