JPH019165Y2 - - Google Patents

Info

Publication number
JPH019165Y2
JPH019165Y2 JP1983077260U JP7726083U JPH019165Y2 JP H019165 Y2 JPH019165 Y2 JP H019165Y2 JP 1983077260 U JP1983077260 U JP 1983077260U JP 7726083 U JP7726083 U JP 7726083U JP H019165 Y2 JPH019165 Y2 JP H019165Y2
Authority
JP
Japan
Prior art keywords
wafer
transfer arm
holding
suction
working device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983077260U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59182932U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7726083U priority Critical patent/JPS59182932U/ja
Publication of JPS59182932U publication Critical patent/JPS59182932U/ja
Application granted granted Critical
Publication of JPH019165Y2 publication Critical patent/JPH019165Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP7726083U 1983-05-23 1983-05-23 ウエハ−搬送装置 Granted JPS59182932U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7726083U JPS59182932U (ja) 1983-05-23 1983-05-23 ウエハ−搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7726083U JPS59182932U (ja) 1983-05-23 1983-05-23 ウエハ−搬送装置

Publications (2)

Publication Number Publication Date
JPS59182932U JPS59182932U (ja) 1984-12-06
JPH019165Y2 true JPH019165Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=30207292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7726083U Granted JPS59182932U (ja) 1983-05-23 1983-05-23 ウエハ−搬送装置

Country Status (1)

Country Link
JP (1) JPS59182932U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62181439A (ja) * 1986-02-05 1987-08-08 Hitachi Ltd 真空処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enrdf_load_stackoverflow) * 1974-06-25 1976-01-12

Also Published As

Publication number Publication date
JPS59182932U (ja) 1984-12-06

Similar Documents

Publication Publication Date Title
JPH0745556A (ja) ダイシング装置
JPH0647655A (ja) ウエーハ面取部研磨方法及び装置
JP2018517308A (ja) シリコンウエハ搬送システム
KR20070058982A (ko) 워크 반송 장치 및 워크 반송 방법
JPH11288988A (ja) アライメント高速処理機構
JPH019165Y2 (enrdf_load_stackoverflow)
JP3497078B2 (ja) ダイボンダ
JPH08227904A (ja) チップボンディング装置
JPH1177361A (ja) レーザ加工方法及びレーザ加工装置
JP2000236009A (ja) 基板処理装置
JPS6225319Y2 (enrdf_load_stackoverflow)
JP3295002B2 (ja) ブラウン管取り付け方法と装置
JPS5850751A (ja) ダイ詰め換え方法
CN215942934U (zh) 晶圆夹持机械手
JPH04371419A (ja) 半導体装置用着脱装置
JPH0575299A (ja) チツプの実装装置
JP3215444B2 (ja) チップの実装方法
KR19980069658A (ko) 양면 진공척
JPH03148839A (ja) 半導体自動組立装置
JPH0624182B2 (ja) 基板交換装置
JPS62176130U (enrdf_load_stackoverflow)
JPH01272127A (ja) ロボットハンドラのループ搬送方式
JPH04310398A (ja) ジョイント切断装置
JPS6112512A (ja) 反転装置
JPH0282537A (ja) 半導体素子のマウント方法