JPH017726Y2 - - Google Patents
Info
- Publication number
- JPH017726Y2 JPH017726Y2 JP11723584U JP11723584U JPH017726Y2 JP H017726 Y2 JPH017726 Y2 JP H017726Y2 JP 11723584 U JP11723584 U JP 11723584U JP 11723584 U JP11723584 U JP 11723584U JP H017726 Y2 JPH017726 Y2 JP H017726Y2
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- arm
- vapor phase
- bell
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 238000001947 vapour-phase growth Methods 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 8
- 230000003028 elevating effect Effects 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11723584U JPS6133868U (ja) | 1984-07-31 | 1984-07-31 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11723584U JPS6133868U (ja) | 1984-07-31 | 1984-07-31 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6133868U JPS6133868U (ja) | 1986-03-01 |
| JPH017726Y2 true JPH017726Y2 (enrdf_load_stackoverflow) | 1989-03-01 |
Family
ID=30676149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11723584U Granted JPS6133868U (ja) | 1984-07-31 | 1984-07-31 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6133868U (enrdf_load_stackoverflow) |
-
1984
- 1984-07-31 JP JP11723584U patent/JPS6133868U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6133868U (ja) | 1986-03-01 |
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