JPH0158631U - - Google Patents
Info
- Publication number
- JPH0158631U JPH0158631U JP15082587U JP15082587U JPH0158631U JP H0158631 U JPH0158631 U JP H0158631U JP 15082587 U JP15082587 U JP 15082587U JP 15082587 U JP15082587 U JP 15082587U JP H0158631 U JPH0158631 U JP H0158631U
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- oxide film
- section
- immersion
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 238000007654 immersion Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 2
- 239000000243 solution Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 1
- 239000007864 aqueous solution Substances 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082587U JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-01 | 1987-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082587U JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-01 | 1987-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158631U true JPH0158631U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-04-12 |
| JPH0449146Y2 JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-11-19 |
Family
ID=31424312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15082587U Expired JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-01 | 1987-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-10-01 JP JP15082587U patent/JPH0449146Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449146Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-11-19 |