JPH0156141B2 - - Google Patents

Info

Publication number
JPH0156141B2
JPH0156141B2 JP60088869A JP8886985A JPH0156141B2 JP H0156141 B2 JPH0156141 B2 JP H0156141B2 JP 60088869 A JP60088869 A JP 60088869A JP 8886985 A JP8886985 A JP 8886985A JP H0156141 B2 JPH0156141 B2 JP H0156141B2
Authority
JP
Japan
Prior art keywords
thin film
substrate holder
substrate
holder electrode
multilayer thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60088869A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61250163A (ja
Inventor
Yoshiichi Ishii
Tomoteru Kawamura
Satoshi Maeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8886985A priority Critical patent/JPS61250163A/ja
Publication of JPS61250163A publication Critical patent/JPS61250163A/ja
Publication of JPH0156141B2 publication Critical patent/JPH0156141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8886985A 1985-04-26 1985-04-26 多層薄膜の製造方法および装置 Granted JPS61250163A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8886985A JPS61250163A (ja) 1985-04-26 1985-04-26 多層薄膜の製造方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8886985A JPS61250163A (ja) 1985-04-26 1985-04-26 多層薄膜の製造方法および装置

Publications (2)

Publication Number Publication Date
JPS61250163A JPS61250163A (ja) 1986-11-07
JPH0156141B2 true JPH0156141B2 (enrdf_load_stackoverflow) 1989-11-29

Family

ID=13955015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8886985A Granted JPS61250163A (ja) 1985-04-26 1985-04-26 多層薄膜の製造方法および装置

Country Status (1)

Country Link
JP (1) JPS61250163A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223460A (ja) * 1990-01-25 1991-10-02 Agency Of Ind Science & Technol 薄膜堆積方法
JP2001240965A (ja) * 2000-02-29 2001-09-04 Showa Shinku:Kk 薄膜製造装置に於ける膜厚分布制御方法及びその装置
US11224871B2 (en) 2017-05-17 2022-01-18 Asahi Kasei Medical Co., Ltd. Phosphate adsorbing agent for blood processing, blood processing system and blood processing method

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63274761A (ja) * 1987-04-28 1988-11-11 Toda Kogyo Corp 真空蒸着多層薄膜形成装置
JPS63274756A (ja) * 1987-04-28 1988-11-11 Toda Kogyo Corp 真空蒸着多層薄膜形成装置
JPH01123065A (ja) * 1987-11-05 1989-05-16 Fuji Electric Co Ltd 薄膜形成装置
JPH0699803B2 (ja) * 1988-05-30 1994-12-07 三容真空工業株式会社 スパッタリングによる透明導電膜の製造装置
JPH02107757A (ja) * 1988-10-15 1990-04-19 Koji Hashimoto アモルファス超格子合金の作製法
JP2002090978A (ja) 2000-09-12 2002-03-27 Hoya Corp 位相シフトマスクブランクの製造方法、及び位相シフトマスクブランクの製造装置
JP2006150160A (ja) * 2004-11-25 2006-06-15 Hosokawa Funtai Gijutsu Kenkyusho:Kk 粉体膜形成装置
JP4809613B2 (ja) * 2005-02-14 2011-11-09 株式会社シンクロン 薄膜形成装置
JP4489820B2 (ja) * 2008-03-31 2010-06-23 Ｈｏｙａ株式会社 位相シフトマスクブランクの製造方法、及び位相シフトマスクブランクの製造装置
JP4739464B2 (ja) * 2008-12-26 2011-08-03 キヤノンアネルバ株式会社 スパッタリング装置、スパッタリング方法及び電子デバイスの製造方法
JP6777098B2 (ja) * 2015-12-24 2020-10-28 コニカミノルタ株式会社 成膜装置および成膜方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912838A (enrdf_load_stackoverflow) * 1972-05-15 1974-02-04

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223460A (ja) * 1990-01-25 1991-10-02 Agency Of Ind Science & Technol 薄膜堆積方法
JP2001240965A (ja) * 2000-02-29 2001-09-04 Showa Shinku:Kk 薄膜製造装置に於ける膜厚分布制御方法及びその装置
US11224871B2 (en) 2017-05-17 2022-01-18 Asahi Kasei Medical Co., Ltd. Phosphate adsorbing agent for blood processing, blood processing system and blood processing method

Also Published As

Publication number Publication date
JPS61250163A (ja) 1986-11-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term