JPH0153449B2 - - Google Patents
Info
- Publication number
- JPH0153449B2 JPH0153449B2 JP56121291A JP12129181A JPH0153449B2 JP H0153449 B2 JPH0153449 B2 JP H0153449B2 JP 56121291 A JP56121291 A JP 56121291A JP 12129181 A JP12129181 A JP 12129181A JP H0153449 B2 JPH0153449 B2 JP H0153449B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- photosensitive
- lower alkyl
- pva
- anion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12129181A JPS5821736A (ja) | 1981-07-31 | 1981-07-31 | 感光性組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12129181A JPS5821736A (ja) | 1981-07-31 | 1981-07-31 | 感光性組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5821736A JPS5821736A (ja) | 1983-02-08 |
JPH0153449B2 true JPH0153449B2 (en, 2012) | 1989-11-14 |
Family
ID=14807617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12129181A Granted JPS5821736A (ja) | 1981-07-31 | 1981-07-31 | 感光性組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5821736A (en, 2012) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6051833A (ja) * | 1983-07-01 | 1985-03-23 | Toray Ind Inc | 感光性樹脂組成物 |
JP2548308B2 (ja) * | 1988-06-29 | 1996-10-30 | 松下電器産業株式会社 | パターン形成方法 |
JP5843620B2 (ja) * | 2012-01-11 | 2016-01-13 | 株式会社クラレ | 一級アミノ基を有するビニルアルコール系重合体を含む架橋性組成物 |
TW201905005A (zh) * | 2017-06-05 | 2019-02-01 | 日商可樂麗股份有限公司 | 側鏈含有胺基之乙烯醇系聚合物 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50101445A (en, 2012) * | 1974-01-10 | 1975-08-12 | ||
JPS55135834A (en) * | 1979-04-10 | 1980-10-23 | Oriental Shashin Kogyo Kk | Photosensitive peeling film |
-
1981
- 1981-07-31 JP JP12129181A patent/JPS5821736A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5821736A (ja) | 1983-02-08 |
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