JPH0152891B2 - - Google Patents

Info

Publication number
JPH0152891B2
JPH0152891B2 JP626286A JP626286A JPH0152891B2 JP H0152891 B2 JPH0152891 B2 JP H0152891B2 JP 626286 A JP626286 A JP 626286A JP 626286 A JP626286 A JP 626286A JP H0152891 B2 JPH0152891 B2 JP H0152891B2
Authority
JP
Japan
Prior art keywords
molecular beam
raw material
source cell
beam source
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP626286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62165318A (ja
Inventor
Tatsu Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP626286A priority Critical patent/JPS62165318A/ja
Publication of JPS62165318A publication Critical patent/JPS62165318A/ja
Publication of JPH0152891B2 publication Critical patent/JPH0152891B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP626286A 1986-01-17 1986-01-17 分子線結晶成長装置 Granted JPS62165318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP626286A JPS62165318A (ja) 1986-01-17 1986-01-17 分子線結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP626286A JPS62165318A (ja) 1986-01-17 1986-01-17 分子線結晶成長装置

Publications (2)

Publication Number Publication Date
JPS62165318A JPS62165318A (ja) 1987-07-21
JPH0152891B2 true JPH0152891B2 (enrdf_load_stackoverflow) 1989-11-10

Family

ID=11633542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP626286A Granted JPS62165318A (ja) 1986-01-17 1986-01-17 分子線結晶成長装置

Country Status (1)

Country Link
JP (1) JPS62165318A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177277U (enrdf_load_stackoverflow) * 1988-06-02 1989-12-18

Also Published As

Publication number Publication date
JPS62165318A (ja) 1987-07-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term