JPH01177277U - - Google Patents

Info

Publication number
JPH01177277U
JPH01177277U JP7360088U JP7360088U JPH01177277U JP H01177277 U JPH01177277 U JP H01177277U JP 7360088 U JP7360088 U JP 7360088U JP 7360088 U JP7360088 U JP 7360088U JP H01177277 U JPH01177277 U JP H01177277U
Authority
JP
Japan
Prior art keywords
crucible
heating means
molecular beam
shutter
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7360088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7360088U priority Critical patent/JPH01177277U/ja
Publication of JPH01177277U publication Critical patent/JPH01177277U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7360088U 1988-06-02 1988-06-02 Pending JPH01177277U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7360088U JPH01177277U (enrdf_load_stackoverflow) 1988-06-02 1988-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7360088U JPH01177277U (enrdf_load_stackoverflow) 1988-06-02 1988-06-02

Publications (1)

Publication Number Publication Date
JPH01177277U true JPH01177277U (enrdf_load_stackoverflow) 1989-12-18

Family

ID=31298737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7360088U Pending JPH01177277U (enrdf_load_stackoverflow) 1988-06-02 1988-06-02

Country Status (1)

Country Link
JP (1) JPH01177277U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065792A (ja) * 1983-09-19 1985-04-15 Fujitsu Ltd 分子線結晶成長装置
JPS62165318A (ja) * 1986-01-17 1987-07-21 Agency Of Ind Science & Technol 分子線結晶成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065792A (ja) * 1983-09-19 1985-04-15 Fujitsu Ltd 分子線結晶成長装置
JPS62165318A (ja) * 1986-01-17 1987-07-21 Agency Of Ind Science & Technol 分子線結晶成長装置

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