JPS63110564U - - Google Patents

Info

Publication number
JPS63110564U
JPS63110564U JP23287U JP23287U JPS63110564U JP S63110564 U JPS63110564 U JP S63110564U JP 23287 U JP23287 U JP 23287U JP 23287 U JP23287 U JP 23287U JP S63110564 U JPS63110564 U JP S63110564U
Authority
JP
Japan
Prior art keywords
electron beam
beam path
evaporated metal
electron
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP23287U priority Critical patent/JPS63110564U/ja
Publication of JPS63110564U publication Critical patent/JPS63110564U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP23287U 1987-01-07 1987-01-07 Pending JPS63110564U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23287U JPS63110564U (enrdf_load_stackoverflow) 1987-01-07 1987-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23287U JPS63110564U (enrdf_load_stackoverflow) 1987-01-07 1987-01-07

Publications (1)

Publication Number Publication Date
JPS63110564U true JPS63110564U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30777017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23287U Pending JPS63110564U (enrdf_load_stackoverflow) 1987-01-07 1987-01-07

Country Status (1)

Country Link
JP (1) JPS63110564U (enrdf_load_stackoverflow)

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