JPS6327467U - - Google Patents

Info

Publication number
JPS6327467U
JPS6327467U JP12086586U JP12086586U JPS6327467U JP S6327467 U JPS6327467 U JP S6327467U JP 12086586 U JP12086586 U JP 12086586U JP 12086586 U JP12086586 U JP 12086586U JP S6327467 U JPS6327467 U JP S6327467U
Authority
JP
Japan
Prior art keywords
gun
ion plating
cluster
generating
cylindrical part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12086586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12086586U priority Critical patent/JPS6327467U/ja
Publication of JPS6327467U publication Critical patent/JPS6327467U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12086586U 1986-08-05 1986-08-05 Pending JPS6327467U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12086586U JPS6327467U (enrdf_load_stackoverflow) 1986-08-05 1986-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12086586U JPS6327467U (enrdf_load_stackoverflow) 1986-08-05 1986-08-05

Publications (1)

Publication Number Publication Date
JPS6327467U true JPS6327467U (enrdf_load_stackoverflow) 1988-02-23

Family

ID=31009587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12086586U Pending JPS6327467U (enrdf_load_stackoverflow) 1986-08-05 1986-08-05

Country Status (1)

Country Link
JP (1) JPS6327467U (enrdf_load_stackoverflow)

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