JPS62182969U - - Google Patents

Info

Publication number
JPS62182969U
JPS62182969U JP7117486U JP7117486U JPS62182969U JP S62182969 U JPS62182969 U JP S62182969U JP 7117486 U JP7117486 U JP 7117486U JP 7117486 U JP7117486 U JP 7117486U JP S62182969 U JPS62182969 U JP S62182969U
Authority
JP
Japan
Prior art keywords
crucible
shield plate
heat shield
thin film
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7117486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343228Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7117486U priority Critical patent/JPH0343228Y2/ja
Publication of JPS62182969U publication Critical patent/JPS62182969U/ja
Application granted granted Critical
Publication of JPH0343228Y2 publication Critical patent/JPH0343228Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7117486U 1986-05-14 1986-05-14 Expired JPH0343228Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7117486U JPH0343228Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7117486U JPH0343228Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Publications (2)

Publication Number Publication Date
JPS62182969U true JPS62182969U (enrdf_load_stackoverflow) 1987-11-20
JPH0343228Y2 JPH0343228Y2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=30913489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7117486U Expired JPH0343228Y2 (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPH0343228Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0343228Y2 (enrdf_load_stackoverflow) 1991-09-10

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