JPS6389964U - - Google Patents

Info

Publication number
JPS6389964U
JPS6389964U JP18184186U JP18184186U JPS6389964U JP S6389964 U JPS6389964 U JP S6389964U JP 18184186 U JP18184186 U JP 18184186U JP 18184186 U JP18184186 U JP 18184186U JP S6389964 U JPS6389964 U JP S6389964U
Authority
JP
Japan
Prior art keywords
crucible
thin film
ionization section
lid
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18184186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516214Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18184186U priority Critical patent/JPH0516214Y2/ja
Publication of JPS6389964U publication Critical patent/JPS6389964U/ja
Application granted granted Critical
Publication of JPH0516214Y2 publication Critical patent/JPH0516214Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18184186U 1986-11-28 1986-11-28 Expired - Lifetime JPH0516214Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18184186U JPH0516214Y2 (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18184186U JPH0516214Y2 (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Publications (2)

Publication Number Publication Date
JPS6389964U true JPS6389964U (enrdf_load_stackoverflow) 1988-06-10
JPH0516214Y2 JPH0516214Y2 (enrdf_load_stackoverflow) 1993-04-28

Family

ID=31127084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18184186U Expired - Lifetime JPH0516214Y2 (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPH0516214Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0516214Y2 (enrdf_load_stackoverflow) 1993-04-28

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