JPH0453052U - - Google Patents

Info

Publication number
JPH0453052U
JPH0453052U JP9426990U JP9426990U JPH0453052U JP H0453052 U JPH0453052 U JP H0453052U JP 9426990 U JP9426990 U JP 9426990U JP 9426990 U JP9426990 U JP 9426990U JP H0453052 U JPH0453052 U JP H0453052U
Authority
JP
Japan
Prior art keywords
chamber
evaporation
melting
source crucible
evaporation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9426990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9426990U priority Critical patent/JPH0453052U/ja
Publication of JPH0453052U publication Critical patent/JPH0453052U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP9426990U 1990-09-06 1990-09-06 Pending JPH0453052U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9426990U JPH0453052U (enrdf_load_stackoverflow) 1990-09-06 1990-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9426990U JPH0453052U (enrdf_load_stackoverflow) 1990-09-06 1990-09-06

Publications (1)

Publication Number Publication Date
JPH0453052U true JPH0453052U (enrdf_load_stackoverflow) 1992-05-06

Family

ID=31832090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9426990U Pending JPH0453052U (enrdf_load_stackoverflow) 1990-09-06 1990-09-06

Country Status (1)

Country Link
JP (1) JPH0453052U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0453052U (enrdf_load_stackoverflow)
JPS6378064U (enrdf_load_stackoverflow)
JPS6186668U (enrdf_load_stackoverflow)
JPS6424944U (enrdf_load_stackoverflow)
JPS63139497U (enrdf_load_stackoverflow)
JPS6346143U (enrdf_load_stackoverflow)
JPS6230910U (enrdf_load_stackoverflow)
JPH0290725U (enrdf_load_stackoverflow)
JPH02109539U (enrdf_load_stackoverflow)
JPH02114887U (enrdf_load_stackoverflow)
JPS61187328U (enrdf_load_stackoverflow)
JPH01141760U (enrdf_load_stackoverflow)
JPH0211474U (enrdf_load_stackoverflow)
JPS6346115U (enrdf_load_stackoverflow)
JPS6389964U (enrdf_load_stackoverflow)
JPS63202221U (enrdf_load_stackoverflow)
JPS6161498U (enrdf_load_stackoverflow)
JPS6174086U (enrdf_load_stackoverflow)
JPH0170834U (enrdf_load_stackoverflow)
JPS6349470U (enrdf_load_stackoverflow)
JPS63119350U (enrdf_load_stackoverflow)
JPH02123457U (enrdf_load_stackoverflow)
JPS61198631U (enrdf_load_stackoverflow)
JPS6367779U (enrdf_load_stackoverflow)
JPS647233U (enrdf_load_stackoverflow)