JPS62190334U - - Google Patents

Info

Publication number
JPS62190334U
JPS62190334U JP7695686U JP7695686U JPS62190334U JP S62190334 U JPS62190334 U JP S62190334U JP 7695686 U JP7695686 U JP 7695686U JP 7695686 U JP7695686 U JP 7695686U JP S62190334 U JPS62190334 U JP S62190334U
Authority
JP
Japan
Prior art keywords
surface treatment
compound
gas
vacuum chamber
atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7695686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7695686U priority Critical patent/JPS62190334U/ja
Publication of JPS62190334U publication Critical patent/JPS62190334U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7695686U 1986-05-23 1986-05-23 Pending JPS62190334U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7695686U JPS62190334U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7695686U JPS62190334U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Publications (1)

Publication Number Publication Date
JPS62190334U true JPS62190334U (enrdf_load_stackoverflow) 1987-12-03

Family

ID=30924511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7695686U Pending JPS62190334U (enrdf_load_stackoverflow) 1986-05-23 1986-05-23

Country Status (1)

Country Link
JP (1) JPS62190334U (enrdf_load_stackoverflow)

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