JPS63157235U - - Google Patents

Info

Publication number
JPS63157235U
JPS63157235U JP4588387U JP4588387U JPS63157235U JP S63157235 U JPS63157235 U JP S63157235U JP 4588387 U JP4588387 U JP 4588387U JP 4588387 U JP4588387 U JP 4588387U JP S63157235 U JPS63157235 U JP S63157235U
Authority
JP
Japan
Prior art keywords
crucible
metal
electron beam
raw material
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4588387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4588387U priority Critical patent/JPS63157235U/ja
Publication of JPS63157235U publication Critical patent/JPS63157235U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4588387U 1987-03-30 1987-03-30 Pending JPS63157235U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4588387U JPS63157235U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4588387U JPS63157235U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63157235U true JPS63157235U (enrdf_load_stackoverflow) 1988-10-14

Family

ID=30865030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4588387U Pending JPS63157235U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63157235U (enrdf_load_stackoverflow)

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