JPH0261956U - - Google Patents

Info

Publication number
JPH0261956U
JPH0261956U JP13916588U JP13916588U JPH0261956U JP H0261956 U JPH0261956 U JP H0261956U JP 13916588 U JP13916588 U JP 13916588U JP 13916588 U JP13916588 U JP 13916588U JP H0261956 U JPH0261956 U JP H0261956U
Authority
JP
Japan
Prior art keywords
sublimate
block
water
cooled hearth
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13916588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336519Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13916588U priority Critical patent/JPH0336519Y2/ja
Publication of JPH0261956U publication Critical patent/JPH0261956U/ja
Application granted granted Critical
Publication of JPH0336519Y2 publication Critical patent/JPH0336519Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13916588U 1988-10-27 1988-10-27 Expired JPH0336519Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13916588U JPH0336519Y2 (enrdf_load_stackoverflow) 1988-10-27 1988-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13916588U JPH0336519Y2 (enrdf_load_stackoverflow) 1988-10-27 1988-10-27

Publications (2)

Publication Number Publication Date
JPH0261956U true JPH0261956U (enrdf_load_stackoverflow) 1990-05-09
JPH0336519Y2 JPH0336519Y2 (enrdf_load_stackoverflow) 1991-08-02

Family

ID=31402169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13916588U Expired JPH0336519Y2 (enrdf_load_stackoverflow) 1988-10-27 1988-10-27

Country Status (1)

Country Link
JP (1) JPH0336519Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0336519Y2 (enrdf_load_stackoverflow) 1991-08-02

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