JPS6451662U - - Google Patents

Info

Publication number

JPS6451662U

JPS6451662U JP14407487U JP14407487U JPS6451662U JP S6451662 U JPS6451662 U JP S6451662U JP 14407487 U JP14407487 U JP 14407487U JP 14407487 U JP14407487 U JP 14407487U JP S6451662 U JPS6451662 U JP S6451662U

Authority

JP

Japan

Prior art keywords

container

evaporation source

evaporated substance

comes

metal layer

Prior art date

1987-09-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001704 evaporation Methods 0.000 claims description 4
• 230000008020 evaporation Effects 0.000 claims description 4
• 239000000126 substance Substances 0.000 claims description 4
• 229910052751 metal Inorganic materials 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 238000010894 electron beam technology Methods 0.000 description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
• 239000000919 ceramic Substances 0.000 description 2
• 229910002804 graphite Inorganic materials 0.000 description 2
• 239000010439 graphite Substances 0.000 description 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 229910052702 rhenium Inorganic materials 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1

Cited By (1)