JPH01173163U - - Google Patents

Info

Publication number
JPH01173163U
JPH01173163U JP6839188U JP6839188U JPH01173163U JP H01173163 U JPH01173163 U JP H01173163U JP 6839188 U JP6839188 U JP 6839188U JP 6839188 U JP6839188 U JP 6839188U JP H01173163 U JPH01173163 U JP H01173163U
Authority
JP
Japan
Prior art keywords
section
crucible
cracker
beam source
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6839188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6839188U priority Critical patent/JPH01173163U/ja
Publication of JPH01173163U publication Critical patent/JPH01173163U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6839188U 1988-05-24 1988-05-24 Pending JPH01173163U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6839188U JPH01173163U (enrdf_load_stackoverflow) 1988-05-24 1988-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6839188U JPH01173163U (enrdf_load_stackoverflow) 1988-05-24 1988-05-24

Publications (1)

Publication Number Publication Date
JPH01173163U true JPH01173163U (enrdf_load_stackoverflow) 1989-12-08

Family

ID=31293713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6839188U Pending JPH01173163U (enrdf_load_stackoverflow) 1988-05-24 1988-05-24

Country Status (1)

Country Link
JP (1) JPH01173163U (enrdf_load_stackoverflow)

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