JPS61183963U - - Google Patents

Info

Publication number
JPS61183963U
JPS61183963U JP6689685U JP6689685U JPS61183963U JP S61183963 U JPS61183963 U JP S61183963U JP 6689685 U JP6689685 U JP 6689685U JP 6689685 U JP6689685 U JP 6689685U JP S61183963 U JPS61183963 U JP S61183963U
Authority
JP
Japan
Prior art keywords
metal
inner circumferential
circumferential wall
collimator
metal vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6689685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6689685U priority Critical patent/JPS61183963U/ja
Publication of JPS61183963U publication Critical patent/JPS61183963U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP6689685U 1985-05-08 1985-05-08 Pending JPS61183963U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689685U JPS61183963U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689685U JPS61183963U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Publications (1)

Publication Number Publication Date
JPS61183963U true JPS61183963U (enrdf_load_stackoverflow) 1986-11-17

Family

ID=30600214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689685U Pending JPS61183963U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Country Status (1)

Country Link
JP (1) JPS61183963U (enrdf_load_stackoverflow)

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