JPS6451662U - - Google Patents
Info
- Publication number
- JPS6451662U JPS6451662U JP14407487U JP14407487U JPS6451662U JP S6451662 U JPS6451662 U JP S6451662U JP 14407487 U JP14407487 U JP 14407487U JP 14407487 U JP14407487 U JP 14407487U JP S6451662 U JPS6451662 U JP S6451662U
- Authority
- JP
- Japan
- Prior art keywords
- container
- evaporation source
- evaporated substance
- comes
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
第１図は本考案の一実施例に係る電子ビーム式
蒸発源容器の概略を示す縦断面図、第２図は本実
施例に係る第１図―矢視の熱流の様子を表現
した説明図、第３図は従来の真空蒸着に適用され
る電子ビーム式蒸発源容器の概略を示す縦断面図
、第４図は従来の蒸発源容器で蒸発物質と接触す
る容器をセラミツクスやグラフアイトで製作した
ものを内挿した容器の概略を示す縦断面図である
。
１，０１……銅製の外周容器、２，０２……冷
却室、３，０３……フイラメント、４，０４……
電子ビーム、５，０５……蒸発物質、０６……蒸
発物質の蒸気、０７……セラミツクスまたはグラ
フアイト製容器、０８……間隙、９……Ｔａまた
はＲｅからなる金属層の容器。
FIG. 1 is a vertical cross-sectional view schematically showing an electron beam type evaporation source container according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing the state of heat flow in the direction of the arrow shown in FIG. 1 according to this embodiment. , Figure 3 is a vertical cross-sectional view schematically showing an electron beam type evaporation source container applied to conventional vacuum evaporation, and Figure 4 is a conventional evaporation source container in which the container that comes into contact with the evaporated substance is made of ceramics or graphite. FIG. 1,01... Copper outer peripheral container, 2,02... Cooling chamber, 3,03... Filament, 4,04...
Electron beam, 5, 05... Evaporated substance, 06... Vapor of evaporated substance, 07... Container made of ceramics or graphite, 08... Gap, 9... Container with metal layer made of Ta or Re.
Claims (1)
ａまたはＲｅを内張りしたことを特徴とする蒸発
源容器。 T as a metal layer on the inner surface of the container that comes into contact with the evaporated substance
An evaporation source container characterized by being lined with a or Re.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14407487U JPS6451662U (en) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14407487U JPS6451662U (en) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6451662U true JPS6451662U (en) | 1989-03-30 |
Family
ID=31411458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14407487U Pending JPS6451662U (en) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6451662U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7312133B2 (en) | 2001-05-18 | 2007-12-25 | Fuji Electric Holdings Co., Ltd. | Method of manufacturing semiconductor device |
-
1987
- 1987-09-21 JP JP14407487U patent/JPS6451662U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7312133B2 (en) | 2001-05-18 | 2007-12-25 | Fuji Electric Holdings Co., Ltd. | Method of manufacturing semiconductor device |