JPS6437458U - - Google Patents

Info

Publication number
JPS6437458U
JPS6437458U JP1987133603U JP13360387U JPS6437458U JP S6437458 U JPS6437458 U JP S6437458U JP 1987133603 U JP1987133603 U JP 1987133603U JP 13360387 U JP13360387 U JP 13360387U JP S6437458 U JPS6437458 U JP S6437458U
Authority
JP
Japan
Prior art keywords
crucible
pierce
electron gun
type electron
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987133603U
Other languages
Japanese (ja)
Other versions
JPH0630843Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987133603U priority Critical patent/JPH0630843Y2/en
Publication of JPS6437458U publication Critical patent/JPS6437458U/ja
Application granted granted Critical
Publication of JPH0630843Y2 publication Critical patent/JPH0630843Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の金属の蒸発装置の一実施例
にかかる概略構成図、第２図は蒸気密度の時間的
変化の説明図、第３図は蒸気密度の変化率と走査
の周波数との関係の説明図、第４図は従来装置の
概略構成図である。 １０…蒸発装置、１１…真空容器、１２…被蒸
発金属、１３…るつぼ、１４…回収板、１５…ピ
アス型電子銃、１６…照射室、１７…開閉弁、１
８…走査用コイル、１９…走査用電源。 Fig. 1 is a schematic diagram of an embodiment of the metal evaporator of this invention, Fig. 2 is an explanatory diagram of temporal changes in vapor density, and Fig. 3 is a diagram showing the relationship between the rate of change in vapor density and the scanning frequency. An explanatory diagram of the relationship, FIG. 4 is a schematic configuration diagram of a conventional device. DESCRIPTION OF SYMBOLS 10... Evaporation device, 11... Vacuum container, 12... Metal to be evaporated, 13... Crucible, 14... Recovery plate, 15... Pierce type electron gun, 16... Irradiation chamber, 17... Open/close valve, 1
8...Scanning coil, 19...Scanning power supply.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器内に設置され分離すべき金属を含む被
蒸発金属が入れられたるつぼと対向してピアス型
電子銃を設け、このピアス型電子銃を走査してる
つぼから時間的に均一に蒸発させ得るようにした
ことを特徴とする金属の蒸発装置。 A pierce-type electron gun is provided opposite a crucible placed in a vacuum container and containing metals to be evaporated, including the metal to be separated, and the pierce-type electron gun scans the crucible to uniformly evaporate the crucible over time. A metal evaporation device characterized by:
JP1987133603U 1987-09-01 1987-09-01 Metal evaporator Expired - Lifetime JPH0630843Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987133603U JPH0630843Y2 (en) 1987-09-01 1987-09-01 Metal evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987133603U JPH0630843Y2 (en) 1987-09-01 1987-09-01 Metal evaporator

Publications (2)

Publication Number Publication Date
JPS6437458U true JPS6437458U (en) 1989-03-07
JPH0630843Y2 JPH0630843Y2 (en) 1994-08-17

Family

ID=31391616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987133603U Expired - Lifetime JPH0630843Y2 (en) 1987-09-01 1987-09-01 Metal evaporator

Country Status (1)

Country Link
JP (1) JPH0630843Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009275244A (en) * 2008-05-13 2009-11-26 Ulvac Japan Ltd Vapor deposition method of metallic oxide film, and method for manufacturing plasma display panel
JP2012207310A (en) * 2012-07-13 2012-10-25 Ulvac Japan Ltd Vapor deposition method of metal oxide film, and method for manufacturing plasma display panel

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169266U (en) * 1984-10-09 1986-05-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169266U (en) * 1984-10-09 1986-05-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009275244A (en) * 2008-05-13 2009-11-26 Ulvac Japan Ltd Vapor deposition method of metallic oxide film, and method for manufacturing plasma display panel
JP2012207310A (en) * 2012-07-13 2012-10-25 Ulvac Japan Ltd Vapor deposition method of metal oxide film, and method for manufacturing plasma display panel

Also Published As

Publication number Publication date
JPH0630843Y2 (en) 1994-08-17

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